Pomiary in-situ jednorodności temperatury i ex-situ grubości osadzonej warstwy w systemie epitaksjalnym AIXTRON CCS 3 x 2"

Pokryszka, Piotr

doi:10.15199/48.2019.10.40

ELECTROTECHNICAL REVIEW

2019

DOI: 10.15199/48.2019.10.40

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Pomiary in-situ jednorodności temperatury i ex-situ grubości osadzonej warstwy w systemie epitaksjalnym AIXTRON CCS 3 x 2"

Piotr Pokryszka¹

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Pomiary in-situ jednorodności temperatury i ex-situ grubości osadzonej warstwy w systemie epitaksjalnym AIXTRON CCS 3 x 2"

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