Pore Narrowing of Mesoporous Silica Materials

Abstract

To use mesoporous silicas as low-k materials, the pore entrances must be really small to avoid diffusion of metals that can increase the dielectric constant of the low-k dielectric. In this paper we present a new method to narrow the pores of mesoporous materials through grafting of a cyclic-bridged organosilane precursor. As mesoporous material, the well-studied MCM-41 powder was selected to allow an easy characterization of the grafting reactions. Firstly, the successful grafting of the cyclic-bridged organosilane precursor on MCM-41 is presented. Secondly, it is demonstrated that pore narrowing can be obtained without losing porosity by removing the porogen template after grafting. The remaining silanols in the pores can then be end-capped with hexamethyl disilazane (HMDS) to make the material completely hydrophobic. Finally, we applied the pore narrowing method on organosilica films to prove that this method is also successful on existing low-k materials.

(3-Aminopropyl)trimethoxysilane Self-Assembled Monolayer as Barrier of Porous SiOCH for Electroless Cu Metallization: Optimizations of SiOCH Hydroxylation and Monolayer Functionalization

“…As wet hydroxylation treatment of conventional nanoporous organosilica dielectrics, such as the last generation low-k dielectric layer (The Applied Producer Black Diamond II, pore size of ∼2 nm), chemical is readily to diffuse into the porous material degrading its dielectric properties. To preclude this, Baklanov et al 19,29,30 has developed a pre-sealing method by depositing different degrees of polymerization organosilane molecule with a molecule length of over 3 nm on a mesoporous film. The method therefore provided efficient sealing of mesoporous low-k materials, preserving the dielectric material with a low-k value and low a leakage current.…”

Organosilica Nanoparticles with Ordered Trimodal Porosity and Selectively Functionalized Mesopores

“…The functionalization of OMS with organic compounds is easy and versatile [8][9][10]. The incorporation of the organic functionalities could be done during the syntheses, where the silica precursor and the organic functional molecules, mostly organosilanes, hydrolyses and condenses around the liquid crystalline phase of the template.…”