2002
DOI: 10.1149/1.1421608
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Porous Al[sub 2]O[sub 3] Nanogeometry Sensor Films: Growth and Analysis

Abstract: Material studies of thin films of porous anodized Al2O3 have been undertaken to determine their applicability as sensing films for application on surface acoustic wave sensors. We describe the production of these films including their growth parameters and provide an analysis of their crystal morphology. These films were then exposed to various concentrations of analyte and their surface areas determined using Brunauer-Emmett-Teller-type analysis. Finally, the surface area as a function of anodization potent… Show more

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Cited by 20 publications
(22 citation statements)
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“…The design of the ORTLE is shown in Figure 1A. A 500 nm aluminum film was sputtered onto a plain float glass slide (75 Â 25 Â 0.5 mm), anodized and subsequently converted to porous alumina as described previously [18,19]. The resulting 750 nm thick transparent alumina film was subsequently coated for 210 s with gold using a CRC-100 sputtering system (Plasma Sciences Inc., Lorton, VA), producing a gold film approximately 100 nm thick.…”
Section: Ortle Design and Conceptmentioning
confidence: 99%
“…The design of the ORTLE is shown in Figure 1A. A 500 nm aluminum film was sputtered onto a plain float glass slide (75 Â 25 Â 0.5 mm), anodized and subsequently converted to porous alumina as described previously [18,19]. The resulting 750 nm thick transparent alumina film was subsequently coated for 210 s with gold using a CRC-100 sputtering system (Plasma Sciences Inc., Lorton, VA), producing a gold film approximately 100 nm thick.…”
Section: Ortle Design and Conceptmentioning
confidence: 99%
“…14 Preconcentration requires the production of high-surface area adsorbent materials. High-surface area can be obtained through some different ways, such as porous silicon layers 15 or anodic etching of aluminum films 16,17 to latter modification aiming VOC´s adsorption. Another high superficial areas include nanofibers or nanofibers modified by the addition of particles inside, 18 conducting polymers for nanowires manufacturing and the detection of H 2 O 2 19 sorptive polymers, 20 which provide a fast adsorption and desorption cycle, etc.…”
Section: Introductionmentioning
confidence: 99%
“…In recent years these films, so-called alumina, due to their honeycomb high-ordered and well-predetermined structure, showing tube shaped pore array with a center-to-center spacing from few tents to about 550 nm [1,2] and the pore diameter from about 10 to 250 nm [3], are widely used as a host material for fabrication nanostructured arrays of metals, [4][5][6] semiconductors, [7][8][9] conducting polymers, [10] and carbon tubes [11,12]. Notably, that high-ordered alumina matrices filled with nanowires or nanotubes of desired material are promising candidates for catalyst, [13] functional electrodes, [14] future sensors, [15,16] magnetic, [17] and optoelectronic [18,19] devices. Furthermore, high-ordered alumina membranes recently have been used for detection DNA sequences at the nmol cm -2 level, [20] preparation of new biochemical reactor systems, [21] and the synthesis of nano-black lipid membranes [22].…”
Section: Introductionmentioning
confidence: 99%