Porous ceramic sensor for measurement of gas moisture in the ppm range

Basu, Santanu; Saha, Manjushree; Chatterjee, Suman; Mistry, Kalyan Kumar; Bandyopadhay, Shibdas; Sengupta, Kamalendu

doi:10.1016/s0167-577x(00)00336-0

Cited by 24 publications

(10 citation statements)

References 3 publications

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“…Our interest is in developing reliable, high performance ceramic materials of large surface area for humidity and gas sensing. Therefore we have revisited the use of nanoporous alumina, a topic of considerable interest since the discovery of its moisture sensitive properties almost fifty years ago [21][22][23][24][25][26][27][28][29][30][31][32].…”

Section: Introductionmentioning

confidence: 99%

Room Temperature Ammonia and Humidity Sensing Using Highly Ordered Nanoporous Alumina Films

Dickey

Varghese

Ong

et al. 2002

Sensors

130

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Abstract:The effect of pore size and uniformity on the response of nanoporous alumina, formed on aluminum thick films through an anodization process, to ammonia and humidity at room temperature is reported. Pore sizes examined range from 13 nm to 48 nm, with pore size standard deviations ranging from 2.6 nm to 7.8 nm. The response of the material to ammonia and humidity is a strong function of pore size and operating frequency. At 5 kHz an alumina sensor with an average pore size of 13.6 nm, standard deviation 2.6 nm, exhibits a factor of two change in impedance magnitude as it is cycled between an ammonia and argon environment. At 5 kHz the same sensor exhibits a well-behaved change in impedance magnitude of 10 3 over 20% to 90% relative humidity. Cole-Cole plots of the 5 Hz to 13 MHz measured impedance spectra, modeled using equivalent circuits, are used to resolve the effects of adsorption and ion migration.

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Section: Introductionmentioning

confidence: 99%

Room Temperature Ammonia and Humidity Sensing Using Highly Ordered Nanoporous Alumina Films

Dickey

Varghese

Ong

et al. 2002

Sensors

130

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“…When these two capacitors are connected in parallel, the sensitivity is enhanced almost two-fold but the actual size remains unchanged. Also, this structure prevents the wastage of very useful dip-coated film on the opposite side of the substrate as reported previously in [7,9,14,16,17,[21][22][23]. The proposed method of sensitivity enhancement is easy, simple, and less time consuming.…”

Section: Introductionmentioning

confidence: 83%

Sensitivity Enhancement of a PPM Level Capacitive Moisture Sensor

2017

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Abstract:Measurement of moisture at ppm or ppb level is very difficult and the fabrication of such sensors at low cost is always challenging. High sensitivity is an important parameter for trace level (ppm) humidity sensors. Anelectronic detection circuit for interfacing the humidity sensor with high sensitivity requires a simple hardware circuit with few active devices. The recent trends for increasing the sensitivity include fabricating nanoporous film with a very large surface area. In the present work, the sensitivity of a parallel plate capacitive type sensor with metal oxide sensing film has been significantly improved with an aim to detect moisture from 3 to 100 ppm in the industrial process gases used to fabricate semiconductors and other sensitive electronic devices. The sensitivity has been increased by (i) fabricating a nanoporous film of aluminum oxide using the sol-gel method and (ii) increasing the cross-sectional area of a parallel plate capacitor. A novel double sided capacitive structure has been proposed where two capacitors have been fabricated-one on the top and one on the bottom side of a flat alumina substrate-and then the capacitors are connected in parallel. The structure has twice the sensitivity of a single sensor in the same ppm range but the size of the structure remains unchanged. The important characteristics of the sensors such as the sensitivity (S = ∆C ∆ppm × 100), the response time (t r ), and the recovery time (t c ) are determined and compared with a commercial SHAW, UKdew point meter. The fabricated double sided sensor has comparable sensitivity (S = 100%, t r (s) = 28, t c (s) = 40) with the commercial meter (S = 100.5%, t r (s) = 258) but has a faster response time. The proposed method of sensitivity enhancement is simple, and mass producible.

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“…Ceramic materials prepared from natural raw clays are currently used as biomaterials [1], catalyst supports [2], gases filters [3], sensors [4], membrane reactors [5], and water treatment systems [6]. Clays based ceramics are aluminosilicates with layered structure where every layer is composed by two, three or four sheets.…”

Section: Introductionmentioning

confidence: 99%

“…The most important group of clays minerals is the doublesheet phyllosilicate kaolinite. The kaolinite (hydrated aluminosilicate, Al 2 Si 2 O 5 (OH) 4 ) is composed by stacked sheets of tetrahedral silica layer [Si 2 O 5 ] 2-and an alumina octahedral layer [Al 2 (OH) 4 ] 2+ [9]. The heat treatment at high temperatures of kaolinite-clays leads to the formation [10].…”

Section: Introductionmentioning

confidence: 99%

Elaboration and characterization of mullite-anorthite-albite porous ceramics prepared from Algerian kaolin

2018

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Mullite-anorthite-albite porous ceramic materials were successfully prepared by a solid-state reaction between kaolin clay and two different additives (CaCO 3 and Na 2 CO 3 ). The starting raw material was characterized by X-ray fluorescence, X-ray diffraction (XRD) and dynamic light scattering techniques. The effect of CaCO 3 and Na 2 CO 3 concentration (10 to 70 wt%) on structure, morphology and thermal properties of the obtained ceramics was investigated by XRD, scanning electron microscopy and differential scanning calorimetry (DSC) techniques. The XRD patterns showed that mullite (3Al 2 O 3 .2SiO 2 ), anorthite (CaO.Al 2 O 3 .2SiO 2 ) and albite (Na 2 O.Al 2 O 3 .6SiO 2 ) were the main crystalline phases present in the materials. The morphology investigation revealed the porous texture of obtained ceramics characterized by the presence of sponge-like structure mainly due to the additive decomposition at high temperatures. The DSC results confirm the presence of four temperature regions related to the kaolin thermal transformations and the formation of minerals. The temperature and enthalpy of mineral formation are additive concentration dependent. As a result, the optimal content of additives which allowed the coexistence of the three phases, a spongelike morphology, and high porosity without cracks corresponded to 15 wt% CaCO 3 , 15 wt% Na 2 CO 3 , and 70 wt% kaolin.

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Porous ceramic sensor for measurement of gas moisture in the ppm range

Cited by 24 publications

References 3 publications

Room Temperature Ammonia and Humidity Sensing Using Highly Ordered Nanoporous Alumina Films

Room Temperature Ammonia and Humidity Sensing Using Highly Ordered Nanoporous Alumina Films

Sensitivity Enhancement of a PPM Level Capacitive Moisture Sensor

Elaboration and characterization of mullite-anorthite-albite porous ceramics prepared from Algerian kaolin

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