2001
DOI: 10.1557/proc-685-d15.4.1
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Porous Silicon Coated with Ultra-Thin Diamond-Like Carbon Film Cathodes

Abstract: The main requirements to electron field emission cathodes are their efficiency, stability and uniformity. In this work we combined the properties of porous silicon layers and diamond-like carbon (DLC) film to obtain emission cathodes with improved parameters. The layered structures of porous silicon and DLC film were formed both on flat n-Si surface and silicon tips created by chemical etching. The conditions of the anodic and stain etching of silicon in HF containing solution under the illumination have been … Show more

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Cited by 4 publications
(1 citation statement)
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“…A porous silicon (PS) layer was formed by electrochemical etching, without applying external voltage, of p-type silicon (ρ v = 10 cm; (100)) flat wafer. The etching was caused by an internal current source due to potential difference between the electrodes in solution [14,15]. The electrolyte composition was 1:1 of 48% HF and ethanol with the addition of 0.66 M H 2 O 2 .…”
Section: Porous Silicon Layer Cathodesmentioning
confidence: 99%
“…A porous silicon (PS) layer was formed by electrochemical etching, without applying external voltage, of p-type silicon (ρ v = 10 cm; (100)) flat wafer. The etching was caused by an internal current source due to potential difference between the electrodes in solution [14,15]. The electrolyte composition was 1:1 of 48% HF and ethanol with the addition of 0.66 M H 2 O 2 .…”
Section: Porous Silicon Layer Cathodesmentioning
confidence: 99%