Porous Silicon Functionalities for BioMEMS

Mammalian Fibroblast Cells Show Strong Preference for Laser-Generated Hybrid Amorphous Silicon-SiO2 Textures

“…Silicon is an attractive material for these mechanisms due to its semiconductor capabilities and mechanical properties. However, silicon is currently used primarily in microelectronics and photovoltaics (3)(4)(5)(6)(7)(8). Its use in bionic devices is limited, as silicon is not biocompatible in its pure form (9,10).…”

Synthesis of Bioactive Three-Dimensional Silicon-Oxide Nanofibrous Structures on the Silicon Substrate for Bionic Devices' Fabrication

“…A biomaterial frequently used for its semiconductor abilities is silicon [10][11][12][13]. Biomedical devices and microelectromechanical systems for the biomedical field (Bio-MEMS) have been fabricated using this material [14,15]. Silicon nanoparticles are heat-free and, when they are excited via a laser, they will not damage living biocells [16].…”