Porous silicon morpbologies and formation mechanism

Smith, Robert L.; Chuang, Shih-Cheng; Collins, S.D.

doi:10.1016/0924-4247(90)87040-p

Cited by 26 publications

(11 citation statements)

References 9 publications

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“…The direction of the pores was found to be independent of the crystal lattice. This is in disagreement with the results of other researchers, who found a dependence of the pore direction on the crystal lattice [17], [24], [27].…”

Section: ) Conventional Versioncontrasting

confidence: 57%

Multi-walled microchannels: free-standing porous silicon membranes for use in /spl mu/TAS

Tjerkstra

Gardeniers

Kelly

et al. 2000

J. Microelectromech. Syst.

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Abstract-Electrochemically formed porous silicon (PS) can be released from the bulk silicon substrate by underetching at increased current density. Using this technique, two types of channels containing free-standing layers of PS were constructed, which were called multi-walled microchannels (MW Cs). They can be used in devices like microsieves, microbatteries, and porous electrodes. Two types of MW C were made: the "conventional" version, consisting of two or more coaxially constructed microchannels separated by a suspended PS membrane, and the buried variety, where a PS membrane is suspended halfway an etched cavity surrounded by silicon nitride walls. The latter is more robust. The pore size of the PS was measured using transmission electron microscopy and field emission gun scanning electron microscopy (FEGSEM) and found to be of the order of 7 nm.[462]Index Terms-Electrochemical etching, microsieve, pore size, porous silicon, silicon micromachining.

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Section: ) Conventional Versioncontrasting

confidence: 57%

Multi-walled microchannels: free-standing porous silicon membranes for use in /spl mu/TAS

Tjerkstra

Gardeniers

Kelly

et al. 2000

J. Microelectromech. Syst.

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“…Various research groups have produced high-quality membranes using a single-step catalyzed hydrolysis or a two-step catalyzed hydrolysis sol-gel process [6][7][8]. Water-assisted formations of ordered mesoporous membranes are described in the numerous articles [9][10][11][12][13][14][15]. In these cases, the arranged membranes are formed by the condensation of water vapour on the fluid polymer solution film and by a subsequent evaporation of a solvent from the polymer solution.…”

Section: Introductionmentioning

confidence: 99%

Controlled Release of Urea Through Mesoporous Methylcellulose Films Derived FromN,NDimethyl Formamide

Singh¹,

Kumari

Kundu

2013

International Journal of Polymeric Materials and Polymeric Biom

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The controlled release of urea through mesoporous methylcellulose (MPMC) films with varying concentration of urea (10, 20, 40, and 50 wt%) was studied. It was found that the release of urea from methyl cellulose (MC) films take place through pores as well as through bulk of the MC matrix. The release of urea through MPMC film is independent of the initial concentration of urea. The mass of diffused urea is well fitted to the transport equations. The transport of urea is pseudo-Fickian. The optical study exhibits the compactness of the MC film at the high percentage of urea.

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“…Many models dealing with the mechanisms of pore formation have been proposed [3,[7][8][9][10][11][12][13][14][15][16][17], and a good understanding of some mechanisms has been achieved.…”

Section: Introductionmentioning

confidence: 99%

Modelling electrochemical current and potential oscillations at the Si electrode

Foca

Carstensen

Föll

2007

Journal of Electroanalytical Chemistry

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Porous silicon morpbologies and formation mechanism

Cited by 26 publications

References 9 publications

Multi-walled microchannels: free-standing porous silicon membranes for use in /spl mu/TAS

Multi-walled microchannels: free-standing porous silicon membranes for use in /spl mu/TAS

Controlled Release of Urea Through Mesoporous Methylcellulose Films Derived FromN,NDimethyl Formamide

Modelling electrochemical current and potential oscillations at the Si electrode

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