Nanotechnologies for the Life Sciences 2009
DOI: 10.1002/9783527610419.ntls0147
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Porous Silicon Particles for Imaging and Therapy of Cancer

Abstract: The sections in this article are Introduction Porous Silicon Microfabrication Characterization Gravimetry Spectroscopic Ellipsometry X ‐Ray Diffraction Nitrogen Adsorption … Show more

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Cited by 4 publications
(4 citation statements)
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“…The system is versatile and the size, shape, porosity, and pore size of S1MP can be finely tuned during the manufacturing processes (Canham, 1999; Cohen et al, 2003; Serda et al, 2009a). Moreover, physico-chemical properties of these particles can be tailored through their surface modifications, producing vectors with various surface characteristics and charges.…”
Section: Introductionmentioning
confidence: 99%
“…The system is versatile and the size, shape, porosity, and pore size of S1MP can be finely tuned during the manufacturing processes (Canham, 1999; Cohen et al, 2003; Serda et al, 2009a). Moreover, physico-chemical properties of these particles can be tailored through their surface modifications, producing vectors with various surface characteristics and charges.…”
Section: Introductionmentioning
confidence: 99%
“…The uniformity and reproducibility of the S1MP's geometry and pore sizes are critical for both the proper performance of the system as well as the safety profile required for regulatory approval and clinical effectiveness. We fabricate S1MPs through electrochemical etch of a high density array of silicon trenches masked by SiN [26,28,29]. The trenches act as nucleation sites for S1MPs and determine their shape.…”
Section: Fabrication Of Porous Silicon Stage One Microparticlesmentioning
confidence: 99%
“…Particles with determined size, shape and porous structure can be fabricated through a combination of photolithographic techniques and electrochemical etch [48–49] (Figure 4). A thin masking layer of SiN is deposited on the silicon substrate, followed by spinning for photoresist development.…”
Section: Fabrication Of Geometrically Diverse Stage One Silicon Pamentioning
confidence: 99%
“…Shorter etch time creates shallow, high aspect ratio (up to 6) discoidal particles; while longer etch times yield thicker, quasi-hemispherical particles with aspect ratios ranging from 1 to 2. The substrate resistivity and doping type, timing, current density and solution composition during the electrochemical etch determine the thickness of the porous layer, the pore size and particle morphology[4851]. Increasing resistivity, larger currents, and higher concentrations of ethanol with respect to hydrofluoric acid all contribute to the increase in pore size.…”
Section: Fabrication Of Geometrically Diverse Stage One Silicon Pamentioning
confidence: 99%