Position Control of Parallel-Plate Microactuators for Probe-Based Data Storage

Lu, Michael S.-C.; Fedder, Gary K.

doi:10.1109/jmems.2004.835761

Cited by 108 publications

(55 citation statements)

References 18 publications

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“…They had been used as a capacitive pressure sensor for measuring blood pressure (Hin-Leung Chau & Wise, 1988), as a microwave switch (Dooyoung Hah et al, 2000), as an air flow sensor (Yu-Hsiang Wang et al, 2007), as a micro-actuator for probe-based data storage (Lu & Fedder, 2004), and in well known commercial applications like inkjet head (Kamusuki et al, 2000), and optical scanners (Schenk et al, 2000).…”

Section: Introductionmentioning

confidence: 99%

New Approach to Pull-In Limit and Position Control of Electrostatic Cantilever Within the Pull-in Limit

Yıldız¹,

Ak²,

Canbolat³

2012

Electrostatics

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Section: Introductionmentioning

confidence: 99%

New Approach to Pull-In Limit and Position Control of Electrostatic Cantilever Within the Pull-in Limit

Yıldız¹,

Ak²,

Canbolat³

2012

Electrostatics

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“…The close-loop system was designed and realized to serve as a magnetic probe tip actuator for a probe-based micro-disc drive [19]. Towfighian et al [20] studied this system and found an asymmetric two-well potential with two distinct chaotic attractors; one of which occurs predominantly in the lower-well, and a second that visits a lower-well orbit and a twowell orbit.…”

Section: Introductionmentioning

confidence: 99%

“…A major obstacle in the use of the electrostatically actuated micro-beams is the presence of pull-in instability which takes place when the electrostatic force overcomes the elastic restoring force in the beam. Recently, closed-loop control was used to retard or eliminate the pull-in instability [19,21].…”

Section: Introductionmentioning

confidence: 99%

Dynamics of a close-loop controlled MEMS resonator

et al. 2011

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The dynamics of a close-loop electrostatic MEMS resonator, proposed as a platform for ultra sensitive mass sensors, is investigated. The parameter space of the resonator actuation voltage is investigated to determine the optimal operating regions. side each of the potential wells and around both wells. The optimal region in the parameter space for mass sensing purposes is determined. In that region, steadystate chaotic attractors develop and spend most of the time in the safe lower well while occasionally visiting the upper well. The robustness of the chaotic attractors in that region is demonstrated by studying their basins of attraction. Further, regions of large dynamic amplification are also identified in the parameter space. In these regions, the resonator can be used as an efficient long-stroke actuator.

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“…The electrostatic actuation is a very common principle and occupies a very important place in MEMS field whether it is in AFM applications [1], mass sensors [2], data storage [3], micro-accelerometers [4], micromirrors [5], positioning for micromanufacturing [6] and many other applications. It involves simple circuitry and has a major advantage in the fact that it offers both electrostatic actuation as well as integrated detection, without the need for an additional position sensing device [7].…”

Section: Introductionmentioning

confidence: 99%

“…Besides, the model of the microsystem's mechanical part describes nonlinear deformation behaviour due to nonlinear restoring forces and coupling between different modes of the structure [8]. In many applications, the system is considered as a second order mass-spring system, representing only the first mode by considering the beam as a plane one-block non-deformable mass moving or vibrating in one dimension, neglecting also the elongation of the beam as in [3][4][5][6]. This can be done when considering small displacements of the microstructure [9], which allows linearizing the model close to a working point [10].…”

Section: Introductionmentioning

confidence: 99%

Microbeam dynamic shaping by closed-loop electrostatic actuation using modal control

Kharrat

Colinet

Voda

2007

2007 Ph.D Research in Microelectronics and Electronics Conference

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To cite this version:Chady Kharrat, Eric Colinet, Alina Voda. Microbeam dynamic shaping by closed-loop electrostatic actuation using modal control. Microelectronics and Electronics Conference, 2007, Ph.D. Research in (PRIME 2007), Jul 2007, Bordeaux, France. pp.197 -200, 2007 Microbeam dynamic shaping by closed-loop electrostatic actuation using modal control Abstract-A closed-loop control approach for the dynamic shaping of a microbeam by electrostatic actuation is described. Starting from a desired displacements reference vector of N small segments of the beam (representing the approximation of the continuous case), n controllers (n is the number of considered modes) output the stresses that must be distributed throughout the beam, on the N actuators. Because this reference may vary with time, the controllers are designed so that they accomplish good response dynamics, as well as performance and robustness specifications. The innovation in this method is that we control the dynamic coefficients associated to the modes of the microbeam and not directly the physical displacements in each small segment, which reduces the number of correctors from N to the number of n modes to control.

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Position Control of Parallel-Plate Microactuators for Probe-Based Data Storage

Cited by 108 publications

References 18 publications

New Approach to Pull-In Limit and Position Control of Electrostatic Cantilever Within the Pull-in Limit

New Approach to Pull-In Limit and Position Control of Electrostatic Cantilever Within the Pull-in Limit

Dynamics of a close-loop controlled MEMS resonator

Microbeam dynamic shaping by closed-loop electrostatic actuation using modal control

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