In this work, a closed loop control system is developed to optically localize and track micro-robots with high precision. These micro-robots (i.e., micro-conveyors) are in motion simultaneously across a smart surface.The developed method’s primary objectives are to optimize their trajectories, avoid collisions between them, and control their position with micrometric resolution. This article presents and characterizes the tracking of a single micro-conveyor, and the method works similarly when multiple micro-robots move over the surface. Our tracking method starts with a scanning phase, where a 2D steering mirror, placed above the smart surface, reflects a laser beam toward the conveying surface seeking for the target. Localization occurs when this light beam reaches the micro-conveyor. By adding a retro-reflective element, that reflects the light in the same direction of the the incident light, onto the surface of the micro-conveyor, the light will be reflected towards a photodetector. Depending on the feedback from the photodetector, the steering mirror rotates to track the trajectory of the micro-conveyor. The tip-tilt angular values of the steering mirror allows the micro-conveyor position to be obtained via calibrated localization system. The aim of this work is to regulate the micro-conveyor, within a closed-loop control system, to reduce the positional error between the actual and desired position. The actual position value is measured in real-time application using our developed optical sensor. Results for tracking in the x-and y-axis have validated the proposed method, with an average tracking error less than 30 µm within a range 150 mm × 150 mm.