Positioning System of Infrared Sensors Based on ZnO Thin Film
Chia-Yu Tsai,
Yan-Wen Lin,
Hong-Ming Ku
et al.
Abstract:Infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric film is improved via annealing at 500 °C for 4 h. The voltage response of the fabricated sensors is evaluated experimentally for a substrate thickness of 1 µm over a sensing range of 30 cm. The results show that the voltage signal varies as an inver… Show more
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