An analytical mass spectrometric method for the elemental analysis of nano-bioelectronic devices involved in bioengineering research was developed and applied for measurements of selected metals (Au, Ti, Pt, Cr, etc.) on interdigitated electrode array chips (IDA-chip). An imaging laser ablation inductively coupled plasma mass spectrometric (LA-ICP-MS) procedure was used to map the elements of interest on the surface of the analyzed sample. The obtained images of metals were in a good agreement and corresponded to the micro-and nanofabricated metal electrode pattern. For the analysis at nanometer resolution scale a NF-LA-ICP-MS (NF-near-field) procedure was applied, which utilize thin Ag needle to enhance laser beam energy and improve spatial resolution of the method. The results show a ϳ100ϫ enhancement of analyte signal, when the needle was positioned in the "near-field region" to the sample surface and the laser shot was performed. In addition, mass spectrometric studies of reproducibly for five separated NF-LA shots in different places of analyzed sample yielded an RSD of the measurement of 16%. io engineering (or biological engineering), including biomedical engineering and nanobiotechnology, is a new, challenging, and rapidly growing high-tech research field [1,2]. The use of biomolecules as the building blocks of higher-level functional devices will lead to applications that range from the integration of biomaterials with electronics in recognition or sensing devices [3]. Bioelectronics research also exploits to use biomolecules to perform the electronic functions that semiconductor devices currently perform, thereby offering the potential to increase integration in combination with additional functionality at the nanometer level. However, the integration of biomolecules or even whole cells with inorganic devices brings several challenges about as there are, for instance, operation of the electronic components under physiological conditions, electrically, biochemically as well as size-adapted bioinorganic interfaces, and biocompatibility of the electronic devices. The implementation of these challenges and the realization of functional bioelectronic junctions require interdisciplinary research, including microengineering, biotechnology, surface chemistry, and analytical research.The fabrication of bioelectronic component on the basis of silicon microtechnology facilitates high integration densities, high spatial resolution, combining signal recording and transducing in one device at relatively low production costs. To build and assemble bioinorganic electronic components with well defined and optimized features, it usually requires control over impurities of trace levels contaminations, which can influence the physical, electrical, magnetic, and chemical properties of thin layered systems. In particular, the biocompatibility of device can be strongly affected by organic and inorganic impurities introduced during the fabrication processes. Therefore, powerful and sensitive trace analytical techniques are ne...