Post-growth tuning of detachable Ge membranes adhesion strength via porous Ge transformation

Ayari, Ahmed; Zouaghi, Firas; Ilahi, Bouraoui; Hanuš, Tadeáš; Cho, Jinyoun; Dessein, Kristof; Machon, Denis; Quaegebeur, Nicolas; Boucherif, Abderraouf

doi:10.1016/j.mssp.2024.108563

Materials Science in Semiconductor Processing

2024

DOI: 10.1016/j.mssp.2024.108563

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Post-growth tuning of detachable Ge membranes adhesion strength via porous Ge transformation

Ahmed Ayari,

Firas Zouaghi,

Bouraoui Ilahi

et al.

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Post-growth tuning of detachable Ge membranes adhesion strength via porous Ge transformation

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References 27 publications

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