Post Processed Foundry MEMS Actuators for Large Deflection Optical Scanning

Starman, La Vern; Torres, David; Hall, Harris J.; Walton, John; Lake, Robert A.

doi:10.1007/978-3-319-95062-4_13

Cited by 3 publications

(1 citation statement)

References 8 publications

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“…However, our design incorporated stressed films on the surface of a structural layer, allowing them to be fabricated predominantly via a commercial foundry process. These structures were originally intended as electrostatically actuated prototype undercarriages for high fill-factor micromirror arrays capable of large angle 3DOF (tip-tilt-piston) motion [32,33]. We recently reported that these structures, unmodified, can be photothermally actuated through small AC modulation of an infrared illuminator, making it possible to measure the frequency response of the structure up to 1 kHz [34].…”

Section: Introductionmentioning

confidence: 99%

Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures

Hall

McDaniel

Shah³

et al. 2021

Micromachines

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Photothermal actuation of microstructures remains an active area of research for microsystems that demand electrically isolated, remote, on-chip manipulation. In this study, large-deformation structures constructed from thin films traditional to microsystems were explored through both simulation and experiment as a rudimentary means to both steer and shape an incident light beam through photothermal actuation. A series of unit step infrared laser exposures were applied at increasing power levels to both uniformly symmetric and deliberately asymmetric absorptive structures with the intent of characterizing the photothermal tilt response. The results indicate that a small angle (<4° at ~74 W/cm2) mechanical tilt can be instantiated through central placement of an infrared beam, although directional control appears highly sensitive to initial beam placement. Greater responsivity (up to ~9° mechanical tilt at ~54 W/cm2) and gross directional control was demonstrated with an asymmetrical absorptive design, although this response was accompanied by a large amount (~5–10°) of mechanical tilt burn-in and drift. Rigorous device cycling remains to be explored, but the results suggest that these structures, and those similar in construction, can be further matured to achieve controllable photoactuation suitable for optical beam control or other applications.

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Section: Introductionmentioning

confidence: 99%