Post-routing redundant via insertion for yield/reliability improvement

Lee, Kuang‐Yao; Wang, Ting-Chi

doi:10.1145/1118299.1118376

Cited by 74 publications

(40 citation statements)

References 11 publications

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“…Therefore, redundant via [31], [41] and redundant wire [5], [26] insertions have been proposed to improve manufacturing yield. However, traditional redundant via insertion is not compatible with unidirectional routing style as shown in Fig.…”

Section: Redundant Local-loop Insertionmentioning

confidence: 99%

Toward Unidirectional Routing Closure in Advanced Technology Nodes

Pan

2017

IPSJ Transactions on System LSI Design Methodology

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Abstract:In advanced technology nodes, unidirectional layout is strongly preferred for high-density metal layers for better manufacturability. The lithography printing of unidirectional layout can be tightly controlled with illumination source optimization and resolution enhancement techniques. Meanwhile, with the unidirectional layout, self-aligned double and quadruple patterning can be applied to achieve finer pitches beyond the resolutions limits of 193 nm lithography tools. However, unidirectional layout style introduces significant impacts on the physical design flow. Notably, unidirectional routing limits the standard cell pin accessibility, which makes manual cell layout design and optimization more and more challenging under modern standard cell architecture. In the routing phase, routing densities and resource competitions on lower metal layers are becoming increasingly high, where intelligent approaches are needed to resolve routing resource competitions for unidirectional routing closure. Moreover, post-routing optimization is inevitable to avoid significant engineering-changing-efforts for unidirectional routing under advanced manufacturing constraints. In this paper, we present a holistic approach, including standard pin access evaluation/optimization, pin access and routing co-optimization and post-routing optimization, to enable unidirectional routing closure in advanced technology nodes.

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Section: Redundant Local-loop Insertionmentioning

confidence: 99%

Toward Unidirectional Routing Closure in Advanced Technology Nodes

Pan

2017

IPSJ Transactions on System LSI Design Methodology

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“…The tools EYE/PEYE [5] consider redundant via insertion in the post-routing stage but the details of how they do redundant via insertion are not described. [13] and [4] also consider redundant via insertion in the post-routing stage. In [4], the single vias of a design are considered one by one to perform redundant via addition, and therefore the solution may just be locally optimal.…”

Section: Metal Layer M+1mentioning

confidence: 99%

“…Besides, since the approach will change the routing result of the timing noncritical nets, it may also induce timing violations even if designers keep the timing critical nets unchanged. [13] reduces the post-routing redundant via insertion problem into the maximum independent set (MIS) problem and proposes an effective heuristic to solve the MIS problem. The execution time of the approach, however, is generally longer according to the results reported in [13].…”

Section: Metal Layer M+1mentioning

confidence: 99%

“…[13] reduces the post-routing redundant via insertion problem into the maximum independent set (MIS) problem and proposes an effective heuristic to solve the MIS problem. The execution time of the approach, however, is generally longer according to the results reported in [13].…”

Section: Metal Layer M+1mentioning

confidence: 99%

“…The first one is the redundant via insertion problem. For this problem, we accelerate the MIS-based approach proposed in [13] to solve it. The approach in [13] consists of the step of conflict graph construction followed by the step of solving an MIS problem on the graph.…”

Section: Metal Layer M+1mentioning

confidence: 99%

See 2 more Smart Citations

Post-routing redundant via insertion and line end extension with via density consideration

Lee¹,

Wang²,

Chao³

2006

Proceedings of the 2006 IEEE/ACM International Conference on Computer-Aided Design - ICCAD '06

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-Redundant via insertion and line end extension employed in the post-routing stage are two well known and highly recommended techniques to reduce yield loss due to via failure. However, if the amount of inserted redundant vias is not well controlled, it could violate via density rules and adversely worsen the yield and reliability of the design. In this paper, we first study the problem of redundant via insertion, and present two methods to accelerate a state-ofthe-art approach (which is based on a maximum independent set (MIS) formulation) to solve it. We then consider the problem of simultaneous redundant via insertion and line end extension. We formulate the problem as a maximum weighted independent set (MWIS) problem and modify the accelerated MIS-based approach to solve it. Lastly, we investigate the problem of simultaneous redundant via insertion and line end extension subject to the maximum via density rule, and present a two-stage approach for it. In the first stage, we ignore the maximum via density rule, and enhance the MWIS-based approach to find the set of regions which violate the maximum via density rule after performing simultaneous redundant via insertion and line end extension. In the second stage, excess redundant vias are removed from those violating regions such that after the removal, the maximum via density rule is met while the total amount of redundant vias removed is minimized. This density-aware redundant via removal problem is formulated as a set of zero-one integer linear programming (0-1 ILP) problems each of which can be solved independently without sacrificing the optimality. The superiorities of our approaches are all demonstrated through promising experimental results.

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Redundant Via Insertion for DSAL

Shim¹,

Shin²

2018

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

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Post-routing redundant via insertion for yield/reliability improvement

Cited by 74 publications

References 11 publications

Toward Unidirectional Routing Closure in Advanced Technology Nodes

Toward Unidirectional Routing Closure in Advanced Technology Nodes

Post-routing redundant via insertion and line end extension with via density consideration

Redundant Via Insertion for DSAL

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