Organic thin-film transistors (OTFTs) are emerging as an inexpensive alternative to amorphous silicon devices because of their many attractive features, such as a simple fabrication process, low cost, and mechanical flexibility. Recently, the performance of OTFTs has been significantly improved by modifying the dielectric surface and/or source and drain (S/D) electrodes, [1] or by using novel dielectric materials. [2][3][4][5] However, high-performance OTFTs were mostly achieved in top-contact (TC) configurations [6] and not in bottom-contact (BC)configurations. As organic active materials are sensitive to chemical wet and ion-beam processes, shadow-mask evaporation is usually used to form S/D electrodes in TC configurations. Such a process, however, is incompatible with largescale integration and does not allow one to produce a channel length shorter than a few tens of micrometers. It is therefore desirable to use a BC configuration, which is compatible with fine lithography processing, for promising applications such as high-resolution flexible displays. The performance of OTFTs is mainly dependent on i) molecular ordering in the organic active layer, ii) charge-injection ability of the source electrode, and iii) charge transport at the interface between the organic active layer and the dielectric layer; the inferior performance of BC-OTFTs compared with TC counterparts is believed to mostly derive from factors (i) and (ii). The step formed by S/D electrodes, in particular thick S/D electrodes on a dielectric layer, disturbs the continuous growth of a single-phase domain in the organic active layer. [7] Additionally, electrode edges with a relatively irregular shape may cause disordered growth of organic crystals adjacent to the electrodes. Despite this, not much effort is required to overcome the inherent drawbacks. A simple approach to completely eliminate the electrode-induced effects in BC-OTFTs is to embed the S/D electrodes in the dielectric layer and planarize the S/D electrodes, making the S/D electrodes and dielectric layer coplanar.In this Communication, we report, for the first time, planarized BC-OTFTs (pBC-OTFTs) with S/D electrodes embedded in the dielectric layer (Fig. 1a); this led to a preferential orientation of organic crystals adjacent to the S/D electrodes and a continuous growth of organic crystals across the S/D edges. Our pentacene pBC transistors on SiO 2 /Si showed a superior performance in controlling conventional BC-OTFTs (cBC-OTFTs) (Fig. 1d) and TC-OTFTs, and the mobility was comparable with the best value ever reported for TC-OTFTs made with similar materials.We investigated bottom-gate pBC-OTFTs and cBC-OTFTs built on a SiO 2 /Si platform. In the present study, Pt (ca. 31 nm)/Cr (ca. 2 nm) were used as the S/D electrodes, and pentacene thin films, fabricated by using the molecularbeam-deposition technique, [8,9] were used as the active organic semiconductor. The width and length of our transistors was 5000 and 22.9 lm, respectively. We tested eight devices for each type of transi...