Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction

Honma, Hiroaki; Tohyama, Yukiya; Mitsuya, Hiroyuki; Hashiguchi, Gen; Fujita, Hiroyuki; Toshiyoshi, Hiroshi

doi:10.1088/1361-6439/ac2e46

Cited by 16 publications

(4 citation statements)

References 44 publications

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“…This technology has gained considerable attention as a promising battery‐free solution 5 . To date, the scavenging of mechanical and vibrational kinetic energy has been achieved through the implementation of three prevailing energy conversion mechanisms, specifically, the piezoelectric, 6 electromagnetic, 7 and electrostatic 8 effects. Piezoelectric energy harvesters have gained considerable global attention as a result of their high energy density and ease of miniaturization in fabrication 9 .…”

Section: Introductionmentioning

confidence: 99%

Theoretical modeling and experimental verification of a broadband microvibrational energy harvesting system

Wei,

Wang,

Gao

et al. 2024

Energy Science & Engineering

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To scavenge energy from imperceptible vibrations, this paper investigates the broadband response and output performance of a microvibrational piezoelectric energy harvesting system with mechanical stopper. The energy harvesting system comprises a cantilever beam made of piezoelectric material, which is affixed with a coil at its unbound end and a mechanical stopper. The coil is placed in a magnetic field to provide an ultra‐low level excitation. The electromechanical model is derived according to force integration method (FIM) and Hertz's contact theory, and numerical simulations are undertaken to evaluate the influence of the excitation level, and the gap on the performance. For the linear counterpart without stopper, experimental results indicate the system generates a peak power of 24.12 μW with matched resistance under excitation with a level of 0.003 N and a frequency of 200.3 Hz. When a polydimethylsiloxane (PDMS) stopper is introduced, the vibration of the piezoelectric beam exhibits an obvious nonlinearity with an amplitude of micron scale. Increasing the excitation level and decreasing the gap could efficiently broaden the response bandwidth. Experimental results demonstrate that a copper stopper with larger elastic modulus results in a wider response frequency range, and the half‐power bandwidth could reach 37.1 Hz under excitation with a level of 0.003 N.

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Section: Introductionmentioning

confidence: 99%

Theoretical modeling and experimental verification of a broadband microvibrational energy harvesting system

Wei,

Wang,

Gao

et al. 2024

Energy Science & Engineering

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“…The stray capacitance can be lowered to some extent using an SOI of a thick BOX layer as reported elsewhere. (36) Nonetheless, an equivalent circuit model suggested that the BOX layer thickness needed to eliminate the effect of the stray capacitance would be more than 10 µm, which is not practically available from a cost and residual-stress viewpoint of SOI wafers.…”

Section: Introductionmentioning

confidence: 99%

MEMS Electrostatic Energy Harvester Developed by Simultaneous Process for Anodic Bonding and Electret Charging

Honma¹,

Ikeno²,

Toshiyoshi³

2023

Sensors and Materials

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In this paper, we present a new structure and a process for electrostatic energy harvesters fabricated using a silicon-on-glass wafer. Conventional electret-based MEMS energy harvesters are produced using a silicon-on-insulator (SOI) wafer, which is inevitably accompanied by parasitic capacitances across the buried oxide layer. The new harvester, on the other hand, can be formed by individually developing silicon and glass parts and subsequently putting them together by anodic bonding, thereby virtually eliminating parasitic capacitance. Special caution is taken not to cause the destruction of the electret layer during high-temperature anodic bonding. The device has been successfully fabricated and experimentally confirmed to function as an energy harvester. This silicon-on-glass structure is beneficial in not only suppressing the parasitic capacitance but also increasing its output power compared with those made by the conventional SOI-based process.

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“…There are various types of devices for collecting vibration energy. These can be classified into electromagnetic harvesting devices [ 9 , 10 , 11 ], electrostatic harvesting devices [ 12 , 13 , 14 ], piezoelectric harvesting devices [ 15 , 16 , 17 ], and frictional electric harvesting devices [ 18 , 19 , 20 ] according to their different principles of power generation. The operating principle of electromagnetic energy harvesting devices is based on Faraday’s law of electromagnetic induction, and their energy recovery devices are simple and do not require separate power supplies [ 21 , 22 ].…”

Section: Introductionmentioning

confidence: 99%

A Magnetically Coupled Piezoelectric–Electromagnetic Low-Frequency Multidirection Hybrid Energy Harvester

Zhu

Zhang

et al. 2022

Micromachines

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The traditional single electromechanical conversion energy harvester can collect energy only in a single vibration direction. Moreover, it requires high environmental vibration frequency, and its output power is low. To solve these problems, a cross-shaped magnetically coupled piezoelectric–electromagnetic hybrid harvester is proposed. The harvester comprised a ring-shaped support frame, a piezoelectric generation structure, and an electromagnetic generation structure. The harvester could simultaneously generate energy piezoelectrically and electrically, in addition, it could generate electricity efficiently at a lower environmental vibration, and it can collect the energy in two vibration directions simultaneously. To verify the effectiveness of the device, we set up a vibration experiment system and conducted comparative experiments about non-magnetically coupled piezoelectric, magnetically coupled piezoelectric, and magnetically coupled piezoelectric–electromagnetic hybrid energy harvesters. The experimental results showed that the output power of the magnetically coupled piezoelectric–electromagnetic hybrid energy harvester was 2.13 mW for the piezoelectric structure and 1.76 mW for the electromagnetic structure under the vibration of single-direction resonant frequency. The total hybrid output power was 3.89 mW. The hybrid harvester could collect vibration energy parallel to the ring in any direction. Furthermore, compared with the non-magnetically coupled piezoelectric energy harvester and the magnetically coupled piezoelectric energy harvester, the output power was increased by 141.6% and 55.6%, respectively.

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Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction

Cited by 16 publications

References 44 publications

Theoretical modeling and experimental verification of a broadband microvibrational energy harvesting system

Theoretical modeling and experimental verification of a broadband microvibrational energy harvesting system

MEMS Electrostatic Energy Harvester Developed by Simultaneous Process for Anodic Bonding and Electret Charging

A Magnetically Coupled Piezoelectric–Electromagnetic Low-Frequency Multidirection Hybrid Energy Harvester

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