Power transfer and mode transitions in low-frequency inductively coupled plasmas

Ostrikov, K.; Xu, Shuyan; Yu, M. Y.

doi:10.1063/1.1289055

Cited by 101 publications

(72 citation statements)

References 17 publications

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“…Similar to mode transition and hysteresis, the presence of mixed mode has also been reported to be translated in every plasma parameter. 3,[8][9][10][11][12] …”

Section: A Mode Transition and Hysteresismentioning

confidence: 99%

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Hysteresis and mode transition in terms of electron energy distribution function for an inductively coupled argon discharge

Singh

2008

Journal of Applied Physics

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Please check the document version of this publication:• A submitted manuscript is the version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal.If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement: The electron energy distribution function ͑EEDF͒ with respect to the hysteresis loop of an inductively coupled argon discharge has been studied experimentally. Contrary to H mode, knowledge of EEDF in E mode is still limited, and an elaborate EEDF measurement with regard to power and pressure for this mode is presented. The Langmuir probe measurements reveal two regions with distinct EEDFs in E mode, which might be a critical missing factor in explaining the unresolved hysteresis and mode transition phenomenon of inductive discharges. Furthermore, a Poynting vector representation has been used to explain the power coupling in an inductive discharge, where ͑azimuthal͒ e component is proposed to be dominant in the "hybrid mode" region.

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“…Similar to mode transition and hysteresis, the presence of mixed mode has also been reported to be translated in every plasma parameter. 3,[8][9][10][11][12] …”

Section: A Mode Transition and Hysteresismentioning

confidence: 99%

“…2,[6][7][8][9][10] An elaborate article was published by Turner and Lieberman 2 investigating several possibilities, which might induce such phenomenon in an inductive discharge, combining global model and transformer model. El-Fayoumi et al 9 proposed a combination of electromagnetic theory and electrical circuit analysis.…”

Section: Introductionmentioning

confidence: 99%

Hysteresis and mode transition in terms of electron energy distribution function for an inductively coupled argon discharge

Singh

2008

Journal of Applied Physics

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“…In addition, the transition between these two modes has been reported to exhibit hysteresis, i.e., when reducing input power starting in H mode, the transition to E mode occurs at lower powers than the transition to H mode when starting in E mode. 1-8 Hysteresis in the E -H mode transition has been reported, almost exclusively in argon, in the measured optical emission, 1,3,5-7 electrical characteristics, 2-4 plasma density, 3,4,8 and magnetic field 3,4 dependence on coil current or input power. Most often, the studied ICPs have external 1,5,6,8 or internal cylindrical coils 3 but hysteresis has also been reported in external flat coil ICPs.…”

mentioning

confidence: 99%

“…Most often, the studied ICPs have external 1,5,6,8 or internal cylindrical coils 3 but hysteresis has also been reported in external flat coil ICPs. 2,4,7 The work is predominantly with driving voltages at rf frequencies of 13.56 MHz 1,3,5-8 but hysteresis has also been observed in ICPs driven at 0.56 MHz ͑Ref. 2͒ and 500 kHz.…”

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confidence: 99%

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Plasma power measurement and hysteresis in the E–H transition of a rf inductively coupled plasma system

Daltrini

Moshkalev

Morgan

et al. 2008

Applied Physics Letters

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An experimental investigation of the argon plasma behavior near the E–H transition in an inductively coupled Gaseous Electronics Conference reference cell is reported. Electron density and temperature, ion density, argon metastable density, and optical emission measurements have been made as function of input power and gas pressure. When plotted versus plasma power, applied power corrected for coil and hardware losses, no hysteresis is observed in the measured plasma parameter dependence at the E–H mode transition. This suggests that hysteresis in the E–H mode transition is due to ignoring inherent power loss, primarily in the matching system.

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Radio‐Frequency and Microwave Thrusters

Micci

2010

Encyclopedia of Aerospace Engineering

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Both radio‐frequency (RF) and microwave electromagnetic energy can be used to heat a propellant gas to plasma temperatures followed by a gasdynamic converging{‐‐}diverging nozzle expansion in an electrothermal rocket mode. RF energy can be coupled to a gas either capacitively or inductively. Capacitive coupling operates effectively only at low gas pressures that are not desired in a thruster concept due to frozen flow losses. Inductive coupling has been shown to effectively couple RF energy to gases at atmospheric and higher pressures. However, because inductively coupled plasmas fill the entire absorption chamber, heat losses to the chamber walls are severe. Microwave energy can be used in one of several modes including, resonant microwave cavity, surface wave or propagating plasma modes, to ignite and sustain plasmas that can be localized away from any walls, thus reducing heat losses from the thruster. State‐of‐the‐art microwave thrusters utilize the microwave resonant cavity mode, where a standing wave is created within a cavity with plasma formation only at regions of high electric field intensity. Microwave thrusters have been demonstrated at frequencies ranging from 915 MHz to 14.5 GHz at power levels from 10 to 11 000 W. High specific impulses have been measured for microwave thrusters for both helium and ammonia propellants.

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Power transfer and mode transitions in low-frequency inductively coupled plasmas

Cited by 101 publications

References 17 publications

Hysteresis and mode transition in terms of electron energy distribution function for an inductively coupled argon discharge

Hysteresis and mode transition in terms of electron energy distribution function for an inductively coupled argon discharge

Plasma power measurement and hysteresis in the E–H transition of a rf inductively coupled plasma system

Radio‐Frequency and Microwave Thrusters

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