2000
DOI: 10.1023/a:1022814503252
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Cited by 4 publications
(4 citation statements)
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“…The XRD diagram at the highest bias of −150 V indicated a lower degree of (111) texture orientation and a larger share of crystallites with (200) axis of orientation. This effect of a high negative bias on TiN structure has been formerly observed [1,4].…”
Section: Xrd Tem and Mechanical Characterization Of Sputtered Coatinmentioning
confidence: 61%
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“…The XRD diagram at the highest bias of −150 V indicated a lower degree of (111) texture orientation and a larger share of crystallites with (200) axis of orientation. This effect of a high negative bias on TiN structure has been formerly observed [1,4].…”
Section: Xrd Tem and Mechanical Characterization Of Sputtered Coatinmentioning
confidence: 61%
“…Their arrangement is more faulted at the interface region with the amorphous Ni-Cu-P and their density in Ti seems greater. Ti film thickness is above 200 nm, to prevent high compressive stress in thinner layers at higher bias voltages, as found in [4]. The gradual alignment of columns is extended over a film thickness of more than 200 nm.…”
Section: Xrd Tem and Mechanical Characterization Of Sputtered Coatinmentioning
confidence: 95%
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