Practical photomask pinhole defect repair using micrometer scale pattern Cd CVD with kHz repetition UV light pulses

Photolytic CVD for one-step photomask repair

“…Methods developed for this purpose have included laser beam induced chemical vapor deposition (CVD) (Ref. 1,2) or ion beam deposition.…”

“…(Ref. 1) Laser light was transmitted through a variable rectangle slit and its reduced image was projected onto the mask's defect portion. Fourth harmonics (266 nm), highly repetitive (>lkHz), high intensity, short light pulse from a Q-switched Nd:YAG laser was selected as a light source.…”