To clarify factors influencing the conditioning effect produced by repetitive breakdowns of a vacuum gap, changes of electrode surface conditions before and after 500 breakdowns caused by impulse voltage application were investigated. Changes of prebreakdown current characteristics were also investigated. The electrode material was copper. The electrode surfaces were analyzed by X‐ray photoelectron spectroscopy (XPS). XPS analysis revealed that the electrode surfaces were completely cleaned by repetitive breakdowns. Prebreakdown characteristics were classified into three patterns: (1) displacement current alone, (2) field emission current as well as displacement current, (3) explosive current increase. Patterns (1) and (4) were observed mainly in the early stage of repetitive breakdowns, while pattern (2) was found in the later stage. It has been concluded that the breakdown mechanism changes during conditioning by repetitive breakdowns. © 2000 Scripta Technica, Electr Eng Jpn, 133(1): 11‐18, 2000