2006
DOI: 10.1002/pssa.200669502
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Precipitation kinetics of LiNbO3 and LiNb3O8 crystalline phases in thermally annealed amorphous LiNbO3 thin films

Abstract: The pyrochlore (LiNb 3 O 8 ) phase in lithium niobate crystal does not contribute to ferroelectric or electrooptic properties. We investigated a way to suppress the precipitation of this phase that was formed by thermally annealing amorphous LiNbO 3 films. The volume fraction of LiNb 3 O 8 with respect to LiNbO 3 becomes higher during longer annealing periods and at higher annealing temperatures because of the evaporation of Li 2 O units from the surface. Annealing in an O 2 atmosphere promotes the formation o… Show more

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Cited by 9 publications
(3 citation statements)
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“…This expression supports the notion that high P O 2 is beneficial to the formation of the LiNb 3 O 8 phase. The appearance of LiNb 3 O 8 in the high P O 2 of 20 Pa in our case is consistent with the previous work that the LN film annealed at the oxygen atmosphere at temperatures higher than 700 °C resulted in the precipitation of the LiNb 3 O 8 phase, and that rapid thermal annealing could produce transparent and single LN phase film. , …”
Section: Resultssupporting
confidence: 93%
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“…This expression supports the notion that high P O 2 is beneficial to the formation of the LiNb 3 O 8 phase. The appearance of LiNb 3 O 8 in the high P O 2 of 20 Pa in our case is consistent with the previous work that the LN film annealed at the oxygen atmosphere at temperatures higher than 700 °C resulted in the precipitation of the LiNb 3 O 8 phase, and that rapid thermal annealing could produce transparent and single LN phase film. , …”
Section: Resultssupporting
confidence: 93%
“…Therefore, the major challenge with the Co:LN growth is the control of the Li species transfer in the plasma from the target to the substrate. Because Li 3 NbO 4 and LiNb 3 O 8 phases do not contribute to ferroelectric or electro-optic properties, P O 2 should be severely controlled to obtain stoichiometric Li/Nb concentration and to grow single-phase Co:LN films.…”
Section: Resultsmentioning
confidence: 99%
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