Precise Analysis of the Differences in the Laser-Activated Energy Density of Aluminum Nitride Ceramics under Various Gas Bath Environments

Abstract

Laser activation can lead to the formation of a layer of aluminum on the surface of aluminum nitride ceramics, thereby preparing metal circuits. Under various gas environments, there are differences in the aluminum layers precipitated by laser-activated aluminum nitride ceramics. The existing literature uses the width of the metal layer to characterize this difference, and these data are very imprecise. Usually, laser energy density is used to describe this processing difference. However, the existing concept of laser energy density is an average value and is not suitable for the threshold of laser activation, because the intensity gradient of the focused Gaussian beam is large, and different intensity distributions represent different energy levels. This article applied a precise concept of laser energy density that sees it as being proportional to light intensity and can be used to evaluate the difference in laser energy density required for the decomposition of aluminum nitride ceramics under various gas bath conditions precisely. Due to the strong energy of a focused Gaussian beam, it is not possible to directly obtain the intensity distribution. Here, the intensity distribution of the collimated beam was used to indirectly obtain the intensity distribution of the focused Gaussian beam, and the threshold values for laser activation under different gas baths were calculated. It was found that the minimum energy density in air increased by 12.5%, and the minimum energy density in nitrogen increased by 3%, using the minimum energy density required for laser activation in argon as the reference.