2006
DOI: 10.1117/12.686361
|View full text |Cite
|
Sign up to set email alerts
|

Precise and high-throughput femtopulse laser mask repair of large defects

Abstract: As mask complexity has increased and design rules continued to shrink, the manufacturing cost per mask has steadily increased as well. Studies also show that defects are the number one issue for mask yield. Smaller defects are typically addressed through process development, or through photomask repair. The occurrence of large defects often may only be further reduced through use of expensive clean room improvements, like SMIF handling systems. The impact of each large defect therefore increases while the feas… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2008
2008
2010
2010

Publication Types

Select...
2

Relationship

1
1

Authors

Journals

citations
Cited by 2 publications
(1 citation statement)
references
References 0 publications
0
1
0
Order By: Relevance
“…In specification hard defect repair has been shown for both 150X and 50X objectives in prior publications. 1 The hard defect repair shown in Figure 8 was highlighted because it demonstrates the application of the iterative CD to target repair on a defect that spans multiple repeating patterns. In this repair, which proceeded from the left to the right of the defect area, both the dark line and adjacent bright spaces were simultaneously monitored to make sure that all of the interacting edge Proc.…”
Section: Hard Defect Repairsmentioning
confidence: 99%
“…In specification hard defect repair has been shown for both 150X and 50X objectives in prior publications. 1 The hard defect repair shown in Figure 8 was highlighted because it demonstrates the application of the iterative CD to target repair on a defect that spans multiple repeating patterns. In this repair, which proceeded from the left to the right of the defect area, both the dark line and adjacent bright spaces were simultaneously monitored to make sure that all of the interacting edge Proc.…”
Section: Hard Defect Repairsmentioning
confidence: 99%