Precise comparison of two-dimensional dopant profiles measured by electron holography and scanning capacitance microscopy

Dual Lens Electron Holography, Scanning Capacitance Microscopy (SCM), Scanning Spreading Resistance Microscopy (SSRM) Comparison for Semiconductor 2-D Junction Characterization

“…A typical p/n junction is characterized by a double inversion layer within the depletion zone. This feature has been reported [17] and is attributed to the space charge density described in an ideal p/n junction [18].…”