Precise Control of Metal Oxide Thin Films Deposition in Magnetron Sputtering Plasmas for High Performance Sensing Devices Fabrication

Nayan, Nafarizal

doi:10.1016/j.proche.2016.07.016

Cited by 12 publications

(8 citation statements)

References 18 publications

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“…Magnetron sputtering technology is a well-known method for metal oxide (MOX) thin film deposition [1,2,3,4,5]. It is widely used in research and development laboratories as well as in the industry lines.…”

Section: Introductionmentioning

confidence: 99%

Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range

2019

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Metal oxide thin films such as copper oxide, titanium dioxide, and tin dioxide deposited by magnetron sputtering technology were verified as a gas-sensitive layer in microwave-based gas sensors operated at 2.4 GHz. The developed gas sensors were tested at room temperature (23 °C) and 50% relative humidity (RH) under exposure to 0–200 ppm of selected volatile organic compounds (acetone, ethanol, and methanol) that are of high interest in industry and biomedical applications. The highest responses to acetone were obtained for CuO-based gas sensors, to ethanol for SnO2-based gas sensors, while for methanol detection both dioxides, SnO2 and TiO2, exhibited good sensitivity.

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Section: Introductionmentioning

confidence: 99%

Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range

2019

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“…Typically, inorganic dielectric materials such as SiO 2 [15,16], Ta 2 O 5 [17][18][19], ZrO 2 [20,21], ZnO [22][23][24], TiO 2 [25][26][27], and Si 3 N 4 [28][29][30] are utilized as dielectric layers due to their high electric permittivity (dielectric constant) and mechanical stability. They are deposited above a conducting layer using various deposition techniques such as anodization [18], atomic layer deposition [31], sputtering [32], electro-spraying [33], and electrochemical deposition [34]. These inorganic materials are inherently hydrophilic [35] and necessitate the addition of hydrophobic layers on top of the dielectric layer.…”

Section: Introductionmentioning

confidence: 99%

Electrowetting-on-dielectric behavior of aqueous droplets and gold nanofluid on an electrospun poly(vinyl chloride) microfiber layer

Budlayan,

Patricio,

Arco

et al. 2024

Mater. Res. Express

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Morphology and wettability of dielectric layers are crucial properties that affect the electrowetting-on-dielectric (EWOD) performance of a working liquid. In this work, the use of a poly(vinyl chloride) (PVC) microfiber-modified PVC dielectric layer as an electrowetting-on-dielectric (EWOD) substrate is explored. Imaging with scanning electron and atomic force microscopy revealed intertwined microfibers on the original PVC film after PVC deposition via electrospinning. Hydrophobicity of the PVC layer was enhanced by the presence of microfibers, with the contact angle (CA) for a water droplet increasing from 84.9° to 123.9°. EWOD behavior of various liquids on the microfiber-modified PVC layer was investigated within a DC voltage range of 0 to 200 V DC. Gold nanofluid exhibited the largest change in CA of 57°, while smaller changes were observed for KOH (19.6°), KCl (21.2°), and water (21°). A mechanism explaining the observed reduction in contact angle for a gold nanofluid droplet is presented. Our results suggest the promising potential of PVC film-PVC microfiber as a hydrophobic dielectric material for EWOD applications involving diverse liquids, including gold nanofluids.

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“…Because of the variations from its fabrication process, cuprous oxide (Cu2O) is a p-type semiconductor with varied optical properties. [19]. copper oxide: Cu2O and CuO, known as (cupric oxide), have been grown using a variety of techniques [18][19].…”

Section: Introductionmentioning

confidence: 99%

“…[19]. copper oxide: Cu2O and CuO, known as (cupric oxide), have been grown using a variety of techniques [18][19]. Additionally, the energy gaps for (Cu2O) molecule [6][7][8][9][10][11][12][13], as well as (CuO) molecule [10][11][12][13] films, which have been reported in literature, rely on a manufacturing procedure Energy gap values for (Cu2O) molecule range (2.10-2.60) eV [6][7][8][9][10][11][12][13], whereas CuO has been reported to have an energy gap of 1.3-2.1 eV [10,13].…”

Section: Introductionmentioning

confidence: 99%

Novel Applications Using Magnetron Sputtering and Atmospheric-Pressure Plasma Jet Techniques: A Review

Anber,

Odah,

Mawat

2023

IJNSN

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Nanomaterials are now widely used in a variety of fields, such as biomedicine and industry, and the world is experiencing its worst conditions yet as a result of the spread of bacteria and the rise in the number of people infected with various diseases as a result of coming into contact with nanomaterials. The spread of pollution can be curtailed by the use of new techniques and experiments. Microorganism membranes can be penetrated by nanoparticles, making nanostructured materials a necessity in biological research. The plasma jet technology is powerful enough to sterilize and kill the bacteria in a small space. There are a wide variety of industrially essential coatings that Magnetron sputtering can be applied to, including those used in the medical industry. We'll go over the history, foundation, and several uses of this method in this review. Other recent discoveries, such as the creation of copper oxide nanoparticles in each of the two processes, are also covered. It can be used in a variety of fields, including biomedical applications. Nanoparticles of copper oxide have the potential to sterilize and kill microorganisms, making them a crucial medical tool to have on hand.

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Precise Control of Metal Oxide Thin Films Deposition in Magnetron Sputtering Plasmas for High Performance Sensing Devices Fabrication

Cited by 12 publications

References 18 publications

Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range

Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range

Electrowetting-on-dielectric behavior of aqueous droplets and gold nanofluid on an electrospun poly(vinyl chloride) microfiber layer

Novel Applications Using Magnetron Sputtering and Atmospheric-Pressure Plasma Jet Techniques: A Review

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