2009
DOI: 10.1364/ol.34.003406
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Precise displacement measurement for a local surface

Abstract: An optical measurement method to get the in-plane and out-of-plane displacements of a local surface using a laser is proposed. The proposed method simultaneously derives the in-plane and out-of-plane displacements by measuring the shift of interference fringes formed by scattered beams. The average errors of the in-plane and out-of-plane displacement measurements are significantly smaller than 10 nm. Moreover, the proposed method uses only low-cost optical elements.

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Cited by 6 publications
(4 citation statements)
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“…Recently [4], it has been demonstrated that speckle patterns propagated in free space in combination with a conventional in-line Michelson interferometer realize single-point measurement of 3D displacement. However, this method will not be able to distinguish between translation and rotation of the object.…”
Section: Introductionmentioning
confidence: 99%
“…Recently [4], it has been demonstrated that speckle patterns propagated in free space in combination with a conventional in-line Michelson interferometer realize single-point measurement of 3D displacement. However, this method will not be able to distinguish between translation and rotation of the object.…”
Section: Introductionmentioning
confidence: 99%
“…Conventional Michelson interferometry needs two mirrors to form planar or spherical waves with regular wavefronts to interfere with each other, whereas the interferometry will be modified to use scattered or diffused waves with complex wavefronts to form interference fringes in this paper. For this reason, the modified method is called modified Michelson interferometry [14].…”
Section: Theorymentioning
confidence: 99%
“…Considering rigid objects only, a design [7] for single-point measurements of three-dimensional motion of a rigid object has been proposed. This system is based on shearing of free-space-propagation speckle patterns for lateral movement and in-line Michelson interferometer for axial movement.…”
Section: Introductionmentioning
confidence: 99%
“…With an adequately chosen point-spread function of the imaging system, and in case the object has an optically rough surface, speckles large enough to enclose the regular fringes will occur in the image of the illuminated part of the object. These speckles will translate in the image plane when the object performs an in-plane displacement or has an in-plane velocity component [4,7]. Again, optical spatialfiltering sensors, tuned to the mean speckle size, can monitor the speckle motion in two dimensions, and together with the optical spatial-filter monitoring the regular fringe pattern, full three-dimensional information of a rigid object's motion can be obtained simultaneously and in real time.…”
Section: Introductionmentioning
confidence: 99%