Precision analysis and process implementation of angular displacement sensor based on flexible varied line-space grating

Yan, 包艳 Bao; Dexing, 杨德兴 Yang; Bingshi, 李秉实 Li; Donghui, 王东辉 Wang; Puchao, 郑普超 Zheng

doi:10.3788/ope.20111908.1859

光学精密工程

2011

DOI: 10.3788/ope.20111908.1859

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Precision analysis and process implementation of angular displacement sensor based on flexible varied line-space grating

包艳 Bao Yan

杨德兴 Yang Dexing²,

李秉实 Li Bingshi³

et al.

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Precision analysis and process implementation of angular displacement sensor based on flexible varied line-space grating

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