Precision bi-directional motion of a linear mechanical shuttle with an electrothermal microengine

Kolesar, Edward S.; Jayachandran, J. Amos Robert; Odom, William E.; Ruff, Matthew D.; Cox, Lee Anne; Htun, Thiri; Stacy, Thomas E.; Yetto, Joseph M.

doi:10.1016/j.tsf.2004.06.171

Cited by 4 publications

(2 citation statements)

References 6 publications

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“…Until now, microactuators are mostly designed on the basis of electrostatic (Pekas, Zhang, & Juncker, 2012), magnetic (Pallapa & Yeow, 2015;Park & Kim, 2004), piezoelectric (Hwang & Park, 2015;Nabawy & Crowther, 2016), magnetostrictive (Kyokane, Tsujimoto, Yanagisawa, Ueda, & Fukuma, 2004), and electrothermal (Kwan et al, 2012;Luo et al, 2005;Yang, Lin, Hu, & Liu, 2009) principles. Among them, electrothermal microactuators (ETMAs) capable of obtaining large expansion/deflection and strong actuating force (Bell, Lu, Fleck, & Spearing, 2005) are thermally driven by utilizing the heat generated by electric current passing through their asymmetric arms (Jing, Ding, & Yang, 2008;Kolesar et al, 2004). However, ETMAs require connection to power supplies through electric wires, and electric current passing through them might bring about electric/electronic interferences to MEMS/MOEMS devices.…”

Section: Introductionmentioning

confidence: 99%

Microscopic research on the properties of optothermal microactuators with different lever ratios

Zhang

Wang

You

et al. 2020

Microscopy Res & Technique

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This paper presents microscopic research on properties of asymmetric optothermal microactuator (OTMA) with different lever ratios. A theoretical model is established on the basis of thermal flux theorem to describe the increase in temperature induced by laser irradiation and thermal expansion of OTMAs' expansion arms. The increases in temperature of three asymmetric OTMAs with total lengths/lever ratios of 540 μm/7.2, 1,080 μm/7.2, 1,080 μm/14.4 were simulated under irradiation of 2.8 mW laser beam, which revealed that a similar increase in temperature will distribute on three expansion arms, with maximum the temperature increase of 82.73, 87.67, and 88.03 C, respectively. Due to these increases in temperature, the arms expand longitudinally and thus the OTMAs are capable of deflecting laterally with enlarged deflection amplitudes. To obtain optimized deflecting properties, three OTMAs with aforementioned lever ratios are further microfabricated and experimented using an optical microscopic observation and measuring system combined with a charge-coupled device. The experimental results show that these OTMAs can be directly actuated by laser beam and acquire maximum deflections of 6.8, 7.2, and 11.4 μm when only 2.8 mW laser power is employed. In addition, it is demonstrated that, although doubling the lever ratio of OTMA does not correspondingly generate twofold deflection, the deflection amplitude can significantly increase with the increase in the lever ratio. With their characteristic elegances, the OTMAs are expected to be practically applied in the micro-electromechanical system and the micro-opto-electromechanical system. K E Y W O R D S asymmetric optothermal microactuator, microscopic observation and measuring, dynamic modelling, lever ratio, microdeflection

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Section: Introductionmentioning

confidence: 99%

Microscopic research on the properties of optothermal microactuators with different lever ratios

Zhang

Wang

You

et al. 2020

Microscopy Res & Technique

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“…[7][8][9] In the heart of these processes and techniques, it is the interplay between electric-Joule heating and local mechanical deformation which determines the performance, efficiency, and reliability.…”

Section: Introductionmentioning

confidence: 99%

Current-induced thermal stresses in a metal cylinder

Yang

2009

Journal of Applied Physics

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Electromechanical coupling has been widely used to actuate and control micromechanical structures and to produce bulk nanostructured materials from micron and submicron particles. The understanding of the mechanical deformation of a mechanical structure carrying an electric current requires the analyses of both electric and current-induced thermomechanical fields. In this work, we analyze the Joule-heating-induced thermoelastic stresses in a metal cylinder which carries an alternating current. Both Joule heating and mechanical stresses are solved analytically for weak skin effect when electric current density varies in radial direction. The thermal stresses created by the Joule heating are found to be a nonlinear function of the angular frequency of the alternating current. The inclusion of the skin effect and radial variation in electric current density in the analyses shows significant quantitative difference in the stress distribution from the thermomechanical deformation of a metal cylinder which carries a direct current.

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Design and performance of a high loading electrostatic micro linear motor

Pham

Nguyen

2014

Microsyst Technol

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Precision bi-directional motion of a linear mechanical shuttle with an electrothermal microengine

Cited by 4 publications

References 6 publications

Microscopic research on the properties of optothermal microactuators with different lever ratios

Microscopic research on the properties of optothermal microactuators with different lever ratios

Current-induced thermal stresses in a metal cylinder

Design and performance of a high loading electrostatic micro linear motor

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