Precision measurement of small plane angles (0.01–20″)

Beyer, W

doi:10.1016/0263-2241(84)90017-4

Measurement

1984

DOI: 10.1016/0263-2241(84)90017-4

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Precision measurement of small plane angles (0.01–20″)

W Beyer

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1998

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Portable autocollimators using the laser diode and the position sensitive detector

Sohn

Kwon

Choe

et al. 1998

Review of Scientific Instruments

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We were able to simplify the structure of the autocollimators and enhance the performance by using one- and two-axis PSDs (position-sensitive detectors) which have spatial resolution of 0.1 and 2.5 μm, respectively, with little dependence on the spot size of incident beam and the visible laser diodes as the light source. Two kinds of portable autocollimators which can measure angles with resolutions 0.01″ and 0.1″, respectively, were made. They were calibrated by the reference angle generator which employed the laser interferometer. The characteristics of temporal stability were evaluated and the profile of a test surface was measured.

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Portable autocollimators using the laser diode and the position sensitive detector

Sohn

Kwon

Choe

et al. 1998

Review of Scientific Instruments

View full text Add to dashboard Cite

show abstract

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Precision measurement of small plane angles (0.01–20″)

Cited by 1 publication

References 0 publications

Portable autocollimators using the laser diode and the position sensitive detector

Portable autocollimators using the laser diode and the position sensitive detector

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