Precision Measurement of Two-Axis Positions and Tilt Motions Using a Surface Encoder

Gao, Wei; Dejima, Shuichi; Shimizu, Yuki; Kiyono, Satoshi; Yoshikawa, Haruna

doi:10.1016/s0007-8506(07)60619-2

Cited by 65 publications

(39 citation statements)

References 10 publications

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“…11 shows a Cartesian measurement system-based surface encoder, for multiple degree-of-freedom (MDOF) precision positioning of planar motion stages [134]. The surface encoder is composed of a planar scale grating and a sensor head [63]. The planar scale grating has sinusoidal micro-structures or binary microstructures along the X-and Y-directions of the grating surface.…”

Section: Multi-axis Cartesian Systemsmentioning

confidence: 99%

Measurement technologies for precision positioning

et al. 2015

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Section: Multi-axis Cartesian Systemsmentioning

confidence: 99%

Measurement technologies for precision positioning

et al. 2015

Self Cite

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“…In this prototype measurement system, x is about 300 millimeters. When assuming that tilt motion φ is 1 arc-second, [9][10][11][12][13][14][15][16][17][18] Abbe error is about 1.5 µm. Therefore, this offset causes large measurement error.…”

Section: Prototype Measurement Systemmentioning

confidence: 99%

A high speed and compact system for profile measurement of scroll compressors

Arai

Inada

Yang

et al. 2009

Int. J. Precis. Eng. Manuf.

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Profile measurement of a scroll compressor is important for improving compression efficiency. This paper describes the height profile measurement of a scroll compressor in the manufacturing line using a prototype measurement system. A commercial CMM is also employed for comparison. The measurement repeatability of the height profile by the prototype measurement system is approximately ±1 µm, which satisfies the requirements from the manufacturing line. Through compensation of the tilt component, result of the prototype measurement system is in good agreement with that of the commercial CMM.

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“…Micro-structured functional surfaces have received everincreasing requirements in optical systems, biological engineering, and measurement systems and so on [1][2][3][4]. However, it is still a challenge to fabricate these surfaces with high quality and high efficiency due to their complicated shapes.…”

Section: Introductionmentioning

confidence: 99%

Determining issues in optimal turning of micro-structured functional surfaces

Zhang

Liu

Zhou

et al. 2015

Int J Adv Manuf Technol

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Micro-structured surfaces have received everincreasing requirements in various fields, including optical systems, biological engineering, measurement system, and so on. Fast tool servo (FTS)-assisted ultra-precision diamond turning technique has been extensively regarded to be a very promising technology for the fabrication of the microstructured functional surfaces with high efficiency and high surface quality. In this paper, the machining flowchart is thoroughly introduced; the key cutting parameters including tool geometry, diamond turning machine (DTM) slide carriage feedrate, and spindle speed are carefully investigated and determined to obtain optimal cutting performances during machining processes. Additionally, a novel toolpath generation method is proposed to minimize the volume of the toolpath data. Comparing with current method, the data volume generated by the new method can be significantly decreased by several times. Finally, the efficiency of the proposed cutting parameter determination method and the new toolpath generation method are verified by fabricating a typical sinusoidal grid surface.

show abstract

Precision Measurement of Two-Axis Positions and Tilt Motions Using a Surface Encoder

Cited by 65 publications

References 10 publications

Measurement technologies for precision positioning

Measurement technologies for precision positioning

A high speed and compact system for profile measurement of scroll compressors

Determining issues in optimal turning of micro-structured functional surfaces

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