2021
DOI: 10.1080/00107514.2022.2101745
|View full text |Cite
|
Sign up to set email alerts
|

Precision metrology: from bulk optics towards metasurface optics

Abstract: With increasing digitalisation of engineering and the development of smart manufacturing, precision metrology is gradually moving away from the laboratory into real world environments and production platforms. Interferometry and focus detection are the most popular optical techniques for these types of application due to their non-destructive measurement, high resolution, and fast response. In this article, we discuss their basic principles, limitations and challenges, and new opportunities. Motivated by the r… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
3
1
1

Relationship

0
5

Authors

Journals

citations
Cited by 10 publications
references
References 61 publications
0
0
0
Order By: Relevance