Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder

Gao, Wei; Araki, Takao; Kiyono, Satoshi; Okazaki, Yuji; Yamanaka, Masashi

doi:10.1016/s0141-6359(03)00028-x

Cited by 289 publications

(122 citation statements)

References 26 publications

Supporting

Mentioning

122

Contrasting

Order By: Relevance

“…Several methods can be used to manufacture the sinusoidal ring surface, such as grinding, polishing and lapping. However, these methods use multiple processes, and it is not easy for them to fabricate complex surfaces, such as sinusoidal surfaces with high form accuracy and highly smooth surfaces [6]. Presently, SPDT with fast tool servo (FTS) and STS are becoming pre-eminent due to their ability to achieve optical quality in a one-stage process without subsequent processing [7] and [8].…”

Section: Introductionmentioning

confidence: 99%

“…With the proposed method, a 40 μm amplitude sinusoidal surface with a nanometric finish of 5.54 nm in Ra is achieved. Gao et al [6] manufactured a sinusoidal angle grid surface with a wavelength of 100 μm and an amplitude of 100 nm over a large surface area with a diameter of 150 mm. Zhu et al [14] described the manufacturing process of a sinusoidal grid surface using FTS on a Zr-based bulk metallic glass (BMG); an 80 μm amplitude sinusoidal surface is obtained using diamond cutting tools.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Ultra-Precision Machining of a Large Amplitude Sinusoidal Ring Surface Based on a Slow Tool Servo

Zhao

et al. 2016

SV-JME

View full text Add to dashboard Cite

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Ultra-Precision Machining of a Large Amplitude Sinusoidal Ring Surface Based on a Slow Tool Servo

Zhao

et al. 2016

SV-JME

View full text Add to dashboard Cite

“…Reference points are first chosen in the xoy plane with equal central angle interval, and then projected onto the given micro-structured surfaces to obtain the tool contact points (TCPs), accordingly determining the tool location points (TLPs) [12][13][14].…”

Section: Introductionmentioning

confidence: 99%

Determining issues in optimal turning of micro-structured functional surfaces

Zhang

Liu

Zhou

et al. 2015

Int J Adv Manuf Technol

View full text Add to dashboard Cite

Micro-structured surfaces have received everincreasing requirements in various fields, including optical systems, biological engineering, measurement system, and so on. Fast tool servo (FTS)-assisted ultra-precision diamond turning technique has been extensively regarded to be a very promising technology for the fabrication of the microstructured functional surfaces with high efficiency and high surface quality. In this paper, the machining flowchart is thoroughly introduced; the key cutting parameters including tool geometry, diamond turning machine (DTM) slide carriage feedrate, and spindle speed are carefully investigated and determined to obtain optimal cutting performances during machining processes. Additionally, a novel toolpath generation method is proposed to minimize the volume of the toolpath data. Comparing with current method, the data volume generated by the new method can be significantly decreased by several times. Finally, the efficiency of the proposed cutting parameter determination method and the new toolpath generation method are verified by fabricating a typical sinusoidal grid surface.

show abstract

“…Fast-tool-servo-(FTS-) based single-point diamond turning (SPDT) is considered a very promising technology for the generation of freeform surfaces and complicated micro/nano structures [1][2][3], and the piezoelectric actuator (PEA) has been widely employed as the driving source of the FTS for its various superior advantages, such as high stiffness, high-frequency response, high resolution, and miniature size [1][2][3][4]. However, due to the intrinsic friction among the material crystals of the PEA, there always exists nonlinear hysteresis effects when electric voltages are applied to drive the PEA [4,5].…”

Section: Introductionmentioning

confidence: 99%

Modeling and Compensation for Hysteresis Nonlinearity of a Piezoelectrically Actuated Fast Tool Servo Based on a Novel Linear Model

Zhu

Zhou

Lin

et al. 2012

ISRN Mechanical Engineering

View full text Add to dashboard Cite

In order to describe and compensate for complex hysteresis nonlinearities of piezoelectrically actuated fast tool servo (FTS), a novel Linear Fractional order Differentiation Hysteresis (LFDH) model is proposed in this paper. By means of the proposed LFDH model which is established on the fractional calculus theory, an analytical description of hysteresis behaviors of the FTS is derived. Furthermore, the LFDH model-based inverse compensation strategy is proposed to suppress the hysteresis effects of the FTS. Finally, a series of experiments are conducted to verify the effectiveness of the LFDH model and the corresponding compensation approach. The results demonstrate that the proposed LFDH model is efficient for describing hysteresis behaviors and the inverse compensation strategy can significantly suppress the inherent hysteresis of the FTS in open-loop operations.

show abstract

Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder

Cited by 289 publications

References 26 publications

Ultra-Precision Machining of a Large Amplitude Sinusoidal Ring Surface Based on a Slow Tool Servo

Ultra-Precision Machining of a Large Amplitude Sinusoidal Ring Surface Based on a Slow Tool Servo

Determining issues in optimal turning of micro-structured functional surfaces

Modeling and Compensation for Hysteresis Nonlinearity of a Piezoelectrically Actuated Fast Tool Servo Based on a Novel Linear Model

Contact Info

Product

Resources

About