J. Ceram. Soc. Japan
 2021
DOI: 10.2109/jcersj2.20157
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Precursor selection for metal–organic chemical vapor deposition of SrHfO<sub>3</sub> films with Sr(dpm)<sub>2</sub> and Sr(hfa)<sub>2</sub>

Sayaka Fujie
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Akihiko Ito
2
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