Predicting the composition of W-B-C coatings sputtered from industrial cylindrical segmented target

Kroker, Michael; Souček, Pavel; Šlapanská, Marta; Sochora, Vjačeslav; Jílek, Mojmír; Vašina, Petr

doi:10.1016/j.surfcoat.2022.128411

Cited by 8 publications

(1 citation statement)

References 21 publications

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“…The target's composition ratio has been validated through original factory certification for composition testing. Any disparity between the target's composition and the actual composition arises due to Ar ion bombardment and sputter deposition ion angles [38].…”

Section: Methodsmentioning

confidence: 99%

The Relationship between Annealing Temperatures and Surface Roughness in Shaping the Physical Characteristics of Co40Fe40B10Dy10 Thin Films

Fern,

Liu,

Chiang

et al. 2023

Coatings

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Co40Fe40B10Dy10 thin films, with thicknesses varying between 10 nm and 50 nm, were grown on a Si(100) substrate. Subsequently, they underwent a 1 h annealing process in an Ar atmosphere at temperatures of 100 °C, 200 °C, and 300 °C. The oxide characteristic peaks of Dy2O3(440), Co2O3(422), and Co2O3(511) were revealed by X-ray diffraction (XRD). The low-frequency alternating current magnetic susceptibility (χac) decreases with frequency. Due to thickness and the anisotropy of the magnetic crystal, the maximum χac and saturation magnetization values rise with thicknesses and annealing temperatures. As the thickness and heat treatment temperature rise, the values for resistivity and sheet resistance tend to fall. The results of atomic force microscopy (AFM) and magnetic force microscopy (MFM) show that average roughness (Ra) lowers as the annealing temperature increases, and the distribution of strip-like magnetic domain becomes more visible. As thickness and annealing temperature increase, there is a corresponding rise in surface energy. Nano-indentation testing shows that hardness initially decreases from 10 nm to 40 nm, followed by an increase at 50 nm. Notably, annealing at 300 °C leads to a significant hardening effect, marking the highest level of hardness observed. Young’s modulus increased as thicknesses and annealing temperatures increased. The magnetic, electric, and adhesive characteristics of CoFeBDy films are highly dependent on surface roughness at various annealing temperatures.

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Section: Methodsmentioning

confidence: 99%

The Relationship between Annealing Temperatures and Surface Roughness in Shaping the Physical Characteristics of Co40Fe40B10Dy10 Thin Films

Fern,

Liu,

Chiang

et al. 2023

Coatings

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Exploring the Correlation Between Surface Roughness, Surface Energy, Nano-indentation, Electrical Properties, and Magnetic Characteristics of Annealed Co40Fe40Dy20 Thin Films Deposited on Si(100) Substrates

Liu,

Chang,

Hsu

et al. 2024

J. Electron. Mater.

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Effect of zirconium doping on the mechanical properties of $$W_{1-x}Zr_{x}B_2$$ on the basis of first-principles calculations and magnetron sputtered films

Maździarz

Psiuk

Krawczyńska

et al. 2022

Archiv.Civ.Mech.Eng

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Potentially superhard $$W_{1-x}Zr_{x}B_2$$ W 1 - x Z r x B 2 polymorphs, hP6-P6$$_{3}$$ 3 /mmc-WB$$_2$$ 2 and hP3-P6/mmm-WB$$_2$$ 2 , were thoroughly analyzed with zirconium doping in the range of x=0-25%, within the framework of the first-principles density functional theory, from both a structural and a mechanical point of view. The obtained results were subsequently compared with the properties of material deposited by the magnetron sputtering method. All predicted structures are mechanically and thermodynamically stable. Theoretical calculations suggest a decrease in hardness $$H_v$$ H v and fracture toughness $$K_{\text {IC}}$$ K IC of the hP6 phase with zirconium doping but no such effect on the hP3 phase. It was observed that an additional defect in the analyzed structure significantly weakens the hP6 phase but strengthens the hP3 phase. The deposited films are characterized by greater hardness but lower fracture toughness. The results of experiments show that not only is solid solution hardening responsible for strengthening the predicted new material but also the change in microstructure, the Hall–Petch effect and vacancies.

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Predicting the composition of W-B-C coatings sputtered from industrial cylindrical segmented target

Cited by 8 publications

References 21 publications

The Relationship between Annealing Temperatures and Surface Roughness in Shaping the Physical Characteristics of Co40Fe40B10Dy10 Thin Films

The Relationship between Annealing Temperatures and Surface Roughness in Shaping the Physical Characteristics of Co40Fe40B10Dy10 Thin Films

Exploring the Correlation Between Surface Roughness, Surface Energy, Nano-indentation, Electrical Properties, and Magnetic Characteristics of Annealed Co40Fe40Dy20 Thin Films Deposited on Si(100) Substrates

Effect of zirconium doping on the mechanical properties of $$W_{1-x}Zr_{x}B_2$$ on the basis of first-principles calculations and magnetron sputtered films

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