2017
DOI: 10.1016/j.tsf.2017.04.004
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Predicting the failure of ultrathin porous membranes in bulge tests

Abstract: Silicon nanomembranes are thin nanoporous films that are frequently used as separation tools for nanoparticles and biological materials. In such applications, increased differential pressure across the nanomembranes directly increases process throughput. Therefore, a predictive tool governing the macroscale failure of the porous thin films is fundamentally important in application areas where high differential pressures are desired. Although the deflections and stresses of the nanomembranes can be reliably pre… Show more

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Cited by 18 publications
(16 citation statements)
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“…Other silicon‐based membranes, such as those used in the canine model, being thicker are therefore less diffusively efficient than our silicon‐nitride membranes . A major challenge when working with these membranes, however, is the brittle nature of ultrathin silicon, which can result in sudden membrane failure above a critical pressure . We have made significant improvements over the last decade in our ability to manufacture ultrathin membranes with high yield and to increase the amount of continuous membrane area.…”
Section: Introductionmentioning
confidence: 99%
“…Other silicon‐based membranes, such as those used in the canine model, being thicker are therefore less diffusively efficient than our silicon‐nitride membranes . A major challenge when working with these membranes, however, is the brittle nature of ultrathin silicon, which can result in sudden membrane failure above a critical pressure . We have made significant improvements over the last decade in our ability to manufacture ultrathin membranes with high yield and to increase the amount of continuous membrane area.…”
Section: Introductionmentioning
confidence: 99%
“…To assess the performance of the MSN membranes, we measured the hydraulic permeance and maximum differential pressure tolerance (often referred to as burst pressure) at different slit widths (0.2, 0.5, and 1.0 µm); we also measured gas permeance as an additional characterization of these novel membrane structures. As an additional pore size comparison, nanoporous silicon nitride (NPN) membranes with cylindrical pores of average 60 nm diameter (DesOrmeaux et al, ; Gillmer et al, ) were also tested. The 0.2 µm MSN membranes, which had the highest porosity, displayed the highest nitrogen gas permeance (Figure b).…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, the maximum differential pressure tolerance for the 0.2 µm MSN membrane was approximately 1.8‐times higher than those for the other two MSN membranes that were twice as thick (Figure c). All else remaining constant, thinner membranes should possess proportionally lower differential pressure tolerances (Gillmer et al, ). However, increasing the porosity of a membrane increases its flexibility and so raises its differential pressure tolerance by providing a means for strain relief (Gillmer et al, ).…”
Section: Introductionmentioning
confidence: 99%
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