Prediction of electron‐solid interaction parameters using machine learning

Abstract

BackgroundElectron backscattering coefficient and electron‐stopping power are essential concepts in many disciplines, from radiation to materials science, semiconductor manufacturing, and space exploration. They enable precise calculations, measurements, and simulations of electron interactions with matter, which contribute to advancing science, technology, and safety in a variety of applications. The availability of these data is fundamental to scientific research to validate hypotheses, conduct experiments, and explore new theories. A relatively novel machine learning approach has demonstrated notable success in enhancing data quality and completeness, significantly contributing to the facilitation of data discovery.PurposeUsing fundamental material property data, the stacking ensemble machine learning (EML) technique was established in this study to generate electron‐solid interaction parameters for any target material over a wide range of energies. The final stacking EML was built using the base and meta learners bagging regressor (BR), K‐nearest neighbors (k‐NN), random forest (RF), support vector regression (SVR), and eXtreme Gradient Boosting (XGB).MethodsIn this study, two publicly available databases with a total of 4030 data points were used. Training datasets have 785 and 525 data points for electron backscattering coefficient and stopping power, respectively, whereas testing datasets contain 262 and 175 data points. Five features were used as input variables to train different individual algorithms and their combinations. On both the training and test datasets, the model was evaluated using different error metrics, including R‐squared (R2), mean‐absolute‐error (MAE), root‐mean‐squared‐error (RMSE), and mean‐absolute‐percentage‐error (MAPE).ResultsOur model evaluation tests revealed that combining RF and XGB with a k‐NN meta‐learner outperformed other algorithms. The analysis of error metrics demonstrated a very close fit to all samples in each training dataset. Furthermore, predictions made by the model on unseen test data indicated accurate estimations of new backscattering and stopping power data.ConclusionsThe developed model achieved high prediction accuracy for various target materials across the broad electron energy spectrum. The outcomes demonstrate the effectiveness of machine learning methodology and the chosen models' suitability for addressing substantial physics challenges.