The purpose of this study is to investigate the effectiveness of thrust force signals for estimation of the burr occurring at the outlet of a drilled hole and the prefailure phase caused by tool wear in drilling holes through thin stainless steel plate (JIS SUS304). Micro-drilling tests, using feed rate, step feed length, and the micro-drill diameter as experimental parameters, were carried out to measure the thrust force during peck drilling operations. Tool wear of the cutting edge and burr occurring at the outlet of drilled holes were measured at intervals of a constant number of drilled holes to consider their relationships to thrust force. As a result, the thrust force caused by tool wear during peck micro-drilling is related to the height of the burr occurring at the outlet of the drilled hole and the prefailure phase of micro-drills.