We fabricated ramp-edge junctions with an interface-modified barrier on YBa 2 Cu 3 O (YBCO) liquid phase epitaxy (LPE) thick films. The LPE thick films were used as ground-planes. For the insulating layer between the ground plane and base electrode, a SrTiO 3 (STO)/(LaAlO 3 ) 0 3 -(SrAl 0 5 Ta 0 5 O 3 ) 0 7 (LSAT)/STO multilayer with the dielectric constant of approximately 32 was employed. We fabricated ramp-edge junctions with La-doped YBa 2 Cu 3 O (La-YBCO) and La-doped YbBa 2 Cu 3 O (La-YbBCO) as base and counter electrodes, respectively. The fabricated junctions exhibited resistively and capacitively shunted junction (RCSJ)-like characteristics and typical c n products of 2.6 and 1.1 mV at 4.2 and 40 K, respectively. The 1 -spread in c as small as 8.1% was obtained for 100-junction series-arrays. The use of ground plane reduced the sheet inductance of electrodes to a value of 0.76-0.94 pH/square at 4.2 K.