Preferential local dissolution of indented silicon {111} surface by aqueous solutions of HF with varying pH

Katayama, Kazutoshi; Senna, Mamoru

doi:10.1016/0167-2738(94)90272-0

Cited by 9 publications

(2 citation statements)

References 13 publications

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“…56,57 The current system is chemically similar to electrochemical dissolution of Si in aqueous HF to form porous Si, although the chemical reaction mechanism involved in porous Si formation has been less thoroughly studied. Several competing mechanisms have been proposed for porous Si formation, although two are most commonly cited.…”

Section: Resultsmentioning

confidence: 99%

“…However, this conclusion is in disagreement with recent results for Si dissolution into HF, which conclude on the basis of solution phase equilibria that HF 2 Ϫ is the active species. 56,57 The current system is chemically similar to electrochemical dissolution of Si in aqueous HF to form porous Si, although the chemical reaction mechanism involved in porous Si formation has been less thoroughly studied. Several competing mechanisms have been proposed for porous Si formation, although two are most commonly cited.…”

Section: Resultsmentioning

confidence: 99%

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Kinetic Analysis of Au deposition from Aqueous HF onto Si(111) by Surface Second Harmonic Generation

Ramanathan

Suni

1999

J. Electrochem. Soc.

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Deposition of Au from aqueous HF onto Si(111) has been studied by Rutherford backscattering (RBS) and surface second harmonic generation (SHG), which at 532 nm is nearly resonant with the surface plasmon of Au nanoclusters. The RBS measurements indicate that Au deposition is rate-limited by diffusion, while the SHG measurements indicate that Au cluster growth is rate-limited by either a surface reaction involving a fluoride-containing species or electron transfer. This apparent contradiction can be reconciled by proposing that initial deposition in the form of AuCN is followed by a slow electroless reduction of Au(I) accompanied by Si oxidation. By addition of HCl and KF, the solution phase equilibria can be separately manipulated, motivating further SHG experiments which indicate that HF and not HF 2Ϫ is the kinetically active fluoride-containing species. The apparent reaction order for Au cluster growth with respect to HF is approximately 1/2, and the reaction order for Au cluster growth with respect to Au(CN) 2Ϫ is near zero in the concentration range 10 Ϫ4 to 10 Ϫ5 M.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%