Preliminary Study on Fluidized Bed Chemical Mechanical Polishing (FB-CMP) Process for Stainless Steel 304 (SS304)

Abstract

Fluidized bed machining (FBM) is used for the surface finishing or cleaning of complex 3D machine parts. FBM is a process of injecting air into a chamber to encourage particles into a fluid-like state. Subsequently, FBM involves rotating the specimen at high speed to process the surface of the material. However, owing to the long processing time involved in FBM, there is a limit to its application in various industries. In this paper, we propose a fluidized bed chemical mechanical polishing (FB-CMP) process, wherein the material removal mechanism of chemical mechanical polishing (CMP) is applied to FBM to improve the processing efficiency of FBM. An FB-CMP system was prepared, and preliminary experiments on the chemical solution were conducted using stainless steel 304 (SS304) plates. In the experiment, hydrogen peroxide (H2O2) was used as the oxidant, oxalic acid (C2H2O4) was used as the complexing agent and alumina (Al2O3) was used as the abrasive particle. The material removal rate (MRR) and roughness reduction rate during the FB-CMP of SS304 were dependent on the composition of the chemical solution. The experimental results revealed the highest MRR and roughness reduction rate at 0.33 wt % H2O2 and 0.2 wt % oxalic acid. To stabilize the proposed FB-CMP process, it is necessary to examine the chemical solutions of various materials.

Electrolytically Ionized Abrasive-Free CMP (EAF-CMP) for Copper

“…In a Cu CMP slurry, the oxidizer creates Cu ions by oxidizing the Cu surface [11,12]. The Cu ions combine with the complexing agent to form a Cu complex [13][14][15]. Corrosion inhibitors reduce the corrosion reaction in the trench at the wafer pattern, enabling global and local planarization [16][17][18].…”

Two-Step Chemical Mechanical Polishing of Stainless Steel

“…Similar results can be found in previous publications. 23,[33][34][35] At low H 2 O 2 concentration, the iron oxide layer formed on the stainless steel surface is thin due to the low oxidization power of low concentration H 2 O 2 , which can be easily removed by mechanical abrasion. With the increase of H 2 O 2 concentration, the oxide layer becomes compact and dense, which serves as a passivation layer, not only protecting the underneath stainless steel substrate from the attack of oxidant, but also resisting mechanical from the abrasives, which is consistent with literature result.…”

Low current density electropolishing and corrosion resistance study of 304 stainless steel

“…Renowned for its exceptional heat resistance, corrosion resistance, and workability, 304 stainless steel finds extensive utility across diverse industries, encompassing marine engineering, manufacturing, construction, and the medical field. [1][2][3][4][5][6] However, in practical application, the effects of friction and collisions on the oxide layer of the stainless steel surface result in its degradation, consequently expediting the onset of corrosion reactions. Electrochemical polishing, as a non-destructive surface treatment process, 7,8 has gained considerable attention.…”