2007
DOI: 10.4028/www.scientific.net/kem.330-332.761
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Preparation and Biocompatibility of Tantalum Oxide Films Containing the Hydroxyl Group

Abstract: Amorphous Ta-O films were synthesized by reactive pulse unbalanced magnetron sputtering system in this paper. Then the well-crystallized Ta-O films were obtained after they were annealed in vacuum at 800°C for 1h. Hydroxyl group on the surface of amorphous tantalum oxide films was prepared by plasma hydrogenation method. The phase structure was investigated by X-ray diffraction (XRD). The hydroxyl group was characterized using Fourier transform infrared spectroscopy (FTIR). The morphology and growth behavior o… Show more

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