Abstract:Amorphous Ta-O films were synthesized by reactive pulse unbalanced magnetron sputtering system in this paper. Then the well-crystallized Ta-O films were obtained after they were annealed in vacuum at 800°C for 1h. Hydroxyl group on the surface of amorphous tantalum oxide films was prepared by plasma hydrogenation method. The phase structure was investigated by X-ray diffraction (XRD). The hydroxyl group was characterized using Fourier transform infrared spectroscopy (FTIR). The morphology and growth behavior o… Show more
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