Preparation and characterization of AlCrTaTiZr multi-element nitride coatings

Lai, Chia-Han; Lin, Su-Jien; Yeh, Jien‐Wei; Chang, Shou-Yi

doi:10.1016/j.surfcoat.2006.06.048

Cited by 299 publications

(135 citation statements)

References 34 publications

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“…In Figure 1b, the average grain size, around 7.1 nm, is almost identical for all states. This suggests that grain coarsening is highly suppressed as a result of severe lattice distortion and sluggish diffusion [25][26][27]. Figure 2 shows hysteresis loops of the as-deposited and post-annealed Fe-Co-Ni-Cr-Al-Si thin films.…”

Section: Resultsmentioning

confidence: 99%

Soft Magnetic Properties of High-Entropy Fe-Co-Ni-Cr-Al-Si Thin Films

Lin

Cheng

Chin

2016

Entropy

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Soft magnetic properties of Fe-Co-Ni-Al-Cr-Si thin films were studied. As-deposited Fe-Co-Ni-Al-Cr-Si nano-grained thin films showing no magnetic anisotropy were subjected to field-annealing at different temperatures to induce magnetic anisotropy. Optimized magnetic and electrical properties of Fe-Co-Ni-Al-Cr-Si films annealed at 200 • C are saturation magnetization 9.13 × 10 5 A/m, coercivity 79.6 A/m, out-of-plane uniaxial anisotropy field 1.59 × 10 3 A/m, and electrical resistivity 3.75 µΩ·m. Based on these excellent properties, we employed such films to fabricate magnetic thin film inductor. The performance of the high entropy alloy thin film inductors is superior to that of air core inductor.

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Section: Resultsmentioning

confidence: 99%

Soft Magnetic Properties of High-Entropy Fe-Co-Ni-Cr-Al-Si Thin Films

Lin

Cheng

Chin

2016

Entropy

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“…Though several factors, such as non-equilibrium process of physical vapor deposition, high entropy of mixing (for multicomponent coatings) and a slight difference in the atomic radii, might contribute to the formation of crystal structures. These results also show that the asdeposited nitrides, such as Zr x Ti 1−x N, Cr x Ti 1−x N, Nb x Ti 1−x N, (AlCrTaTiZr)N, (CrTaTiVZr)N, (TiHfVNbZr)N [46][47][48].…”

Section: Growth Mechanism Of Nitride Coatingsmentioning

confidence: 85%

The effects of Cr and Si additions and deposition conditions on the structure and properties of the (Zr-Ti-Nb)N coatings

Pogrebnjak

Bagdasaryan

Береснев

et al. 2017

Ceramics International

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A B S T R A C TIn this study, (Zr-Ti-Nb)N, (Zr-Ti-Cr-Nb)N and (Zr-Ti-Cr-Nb-Si)N nitride coatings were obtained using a welldeveloped vacuum arc deposition. The systematical investigations demonstrate that the chemical composition, microstructure, and properties of the coatings intimately rely on the deposition parameters (pressure of working gas and substrate bias). Effects of Cr and Si additions on microstructure and mechanical properties of the (ZrTi-Nb)N coatings have been investigated using scanning electron microscopy (SEM) equipped with energy dispersive spectrum (EDS), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), transmission electron microscope (TEM), hardness measurements and adhesion testing. First-principles band-structure calculations and Gibbs-Rosenbaum triangle representation have been used to investigate the elemental and phase compositions in nitride coatings. The multi-component (Zr-Ti-Cr-Nb-Si)N and (Zr-Ti-Nb)N coatings are found to be a simple face-centered cubic (FCC) solid solution. For the coatings without Si, the structure is mainly composed of TiN fcc phase and Cr 2 N trigonal modification. The hardness values were in the ranges (24-42 GPa). The (Zr-Ti-Nb)N, (Zr-Ti-Cr-Nb)N coatings provided the best adhesive strength in different conditions. The (Zr-Ti-Cr-Nb-Si)N coatings exhibited the worst adhesive strength, which may be attributed to the relative low hardness.

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“…[35], these peaks corresponded to the (111), (200), (220), (311) lattices of the NaCl-type face-centered cubic (fcc) structure. This finding clearly indicated that due to the effect of high mixing entropies of multiple components, the HEAN x Si y coatings formed a simple solid-solution structure, rather than any complex phase separations [17][18][19][20][21], in which five metallic elements randomly distributed at the "Na" site of the NaCl-type fcc structure, while N located at the "Cl" site [26,36,37]. As listed in Table 1, without Si doping, the interplanar spacing of HEAN x (111) lattice was 0.251 nm approximate to the average spacing of five metal nitrides (AlN, CrN, TaN, TiN, ZrN) [19,21].…”

Section: Compositions and Structures Of Hean X Si Y Coatingsmentioning

confidence: 87%

“…Multi-component HEAs typically possess very simple solid-solution structures because of the effect of high mixing entropies to lower free energy [14], and exhibit extraordinary performances such as good mechanical properties, high thermal stabilities, and an excellent wear resistance [14][15][16]. Accordingly, HEAs, HEA nitrides (HEANs), HEA carbides (HEACs) and HEA carbonitrides (HEACNs) have been intensively studied for protective coating applications [17][18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

“…The Ti-Si-N system presented better thermal stabilities than Ti-Al-N did [25][26][27], and all other Si-doped systems, including Zr-Si-N, Al-Si-N and Cr-Si-N, also showed a hardness higher than 35 GPa [28][29][30][31]. Because of the anticipated improvement in mechanical performance by the severe lattice distortions of multi-component HEAs with different atom sizes [17,19,21], the strong covalent bonds of incorporated Si [22], the grain refinements and strengthening by amorphous SiN x boundary layers [22,23], and also the large lattice mismatches between nitrides and silicides (similar to those between nitrides and carbides [21]), multi-component (AlCrTaTiZr)N x Si y high-entropy coatings (denoted as HEAN x Si y , x and y: N-and Si-to-HEA content ratios) were thus developed in this study by co-sputtering of AlCrTaTiZr alloy and Si in an Ar/N 2 mixed atmosphere, and their mechanical properties and deformation behaviors on the nanoscale were characterized.…”

Section: Introductionmentioning

confidence: 99%

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Nanomechanical Properties and Deformation Behaviors of Multi-Component (AlCrTaTiZr)NxSiy High-Entropy Coatings

Lin

Chang

et al. 2013

Entropy

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Abstract:In this study multi-component (AlCrTaTiZr)N x Si y high-entropy coatings were developed by co-sputtering of AlCrTaTiZr alloy and Si in an Ar/N 2 mixed atmosphere with the application of different substrate biases and Si-target powers. Their nanomechanical properties and deformation behaviors were characterized by nanoindentation tests. Because of the effect of high mixing entropies, all the deposited multi-component (AlCrTaTiZr)N x Si y high-entropy coatings exhibited a simple face-centered cubic solid-solution structure. With an increased substrate bias and Si-target power, their microstructures changed from large columns with a [111] preferred orientation to a nanocomposite form with ultrafine grains. The hardness, H/E ratio and H 3 /E 2 ratio of (AlCrTaTiZr)N 1.07 Si 0.15 coating reached 30.2 GPa, 0.12 and 0.41 GPa, respectively, suggesting markedly suppressed dislocation activities and a very high resistance to wear and plastic deformation, attributable to grain refinements and film densification by the application of substrate bias, a nanocomposite structure by the introduction of silicon nitrides, and a strengthening effect induced by severe lattice distortions. In the deformed regions under indents, stacking faults or partial dislocations were formed, while in the stress-released regions, near-perfect lattices recovered.

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Preparation and characterization of AlCrTaTiZr multi-element nitride coatings

Cited by 299 publications

References 34 publications

Soft Magnetic Properties of High-Entropy Fe-Co-Ni-Cr-Al-Si Thin Films

Soft Magnetic Properties of High-Entropy Fe-Co-Ni-Cr-Al-Si Thin Films

The effects of Cr and Si additions and deposition conditions on the structure and properties of the (Zr-Ti-Nb)N coatings

Nanomechanical Properties and Deformation Behaviors of Multi-Component (AlCrTaTiZr)NxSiy High-Entropy Coatings

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