n-Type Bi 2 Te 3Ày Se y thin films were prepared by potentiodynamic electrodeposition onto Au, Bi, and Bi 2 Te 3Ày Se y substrates at room temperature. The electrochemical behaviors of Bi 3+ , HTeO 2 + , and H 2 SeO 3 on different substrates were investigated by cyclic voltammetry. The morphology, composition, and structure of the films were studied by using environmental scanning electron microscopy (ESEM), energy-dispersive spectroscopy (EDS), and x-ray diffraction (XRD), respectively. The thermoelectric properties of n-type Bi 2 Te 3Ày Se y films were determined by measuring the Seebeck coefficient (a) and electrical resistivity (q). The results showed that the composition and morphology of the films were sensitive to the substrate material. X-ray diffraction (XRD) analysis indicated that the preferred orientation of annealed films was affected by the substrate and that the film prepared on the Bi 2 Te 3Ày Se y substrate exhibited the strongest (015) orientation, with rhombohedral structure. It was proved that the properties of the annealed films could be affected by the substrate and that the film with the highest power factor (P = a 2 /q) was obtained on the Bi 2 Te 3Ày Se y substrate.