Preparation and characterization of high-quality stoichiometric LiNbO3 thick films prepared by the sol–gel method

Takahashi, Makoto; Yamauchi, Keiko; Yagi, Touru; Nishiwaki, Akira; Wakita, Koichi; Ohnishi, Norio; Hotta, Kazutoshi; Sahashi, Ietaka

doi:10.1016/j.tsf.2003.12.066

Cited by 27 publications

(16 citation statements)

References 14 publications

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“…Currently, LiNbO 3 thin films can be obtained by following technological methods compatible with modern integrated technologies of micro-and nanoelectronics: epitaxy [24], chemical vapor deposition [25], Radio Frequencysputtering [26], pulsed laser deposition [27][28][29][30], and the sol-gel process [31].…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric Energy Harvester Based on LiNbO3 Thin Films

et al. 2020

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This paper reports the results of the influence of the energy of laser pulses during laser ablation on the morphology and electro-physical properties of LiNbO3 nanocrystalline films. It is found that increasing laser pulse energy from 180 to 220 mJ results in the concentration of charge carriers in LiNbO3 films decreasing from 8.6 × 1015 to 1.0 × 1013 cm−3, with the mobility of charge carriers increasing from 0.43 to 17.4 cm2/(V·s). In addition, experimental studies of sublayer material effects on the geometric parameters of carbon nanotubes (CNTs) are performed. It is found that the material of the lower electrode has a significant effect on the formation of CNTs. CNTs obtained at the same growth time on a sample with a Cr sublayer have a smaller diameter and a longer length compared to samples with a V sublayer. Based on the obtained results, the architecture of the energy nanogenerator is proposed. The current generated by the nanogenerator is 18 nA under mechanical stress of 600 nN. The obtained piezoelectric nanogenerator parameters are used to estimate the parameters of the hybrid-carbon-nanostructures-based piezoelectric energy converter. Obtained results are promising for the development of efficient energy converters for alternative energy devices based on lead-free ferroelectric films.

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Section: Introductionmentioning

confidence: 99%

Piezoelectric Energy Harvester Based on LiNbO3 Thin Films

et al. 2020

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“…LN has a broad homogeneity range with compositions from congruent (cLN, 48.35–48.6 mol% Li 2 O [9]) to stoichiometric (sLN, ~50 mol% Li 2 O [9]). At temperatures above 300 °C the congruent material degrades [10] and is, therefore, inappropriate for high temperature applications. In contrast, our preliminary tests of the stoichiometric crystals indicated that the material is stable up to at least 900 °C [11].…”

Section: Introductionmentioning

confidence: 99%

Development of a Wireless Mesh Sensing System with High-Sensitivity LiNbO3 Vibration Sensors for Robotic Arm Monitoring

Lin

Jen

et al. 2019

Sensors

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In recent years, multi-axis robots are indispensable in automated factories due to the rapid development of Industry 4.0. Many related processes were required to have the increasing demand for accuracy, reproducibility, and abnormal detection. The monitoring function and immediate feedback for correction is more and more important. This present study integrated a highly sensitive lithium niobate (LiNbO3) vibration sensor as a sensor node (SN) and architecture of wireless mesh network (WMN) to develop a monitoring system (MS) for the robotic arm. The advantages of the thin-film LiNbO3 piezoelectric sensor were low-cost, high-sensitivity and good electrical compatibility. The experimental results obtained from the vibration platform show that the sensitivity achieved 50 mV/g and the reaction time within 1 ms. The results of on-site testing indicated that the SN could be configured on the relevant equipment quickly and detect the abnormal vibration in specific equipment effectively. Each SN could be used more than 10 h at the 80 Hz transmission rate under WMN architecture and the loss rate of transmission was less than 0.01% within 20 m.

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“…The focus has been on lattice-matched Al 2 O 3 (0001) and LiTaO 3 (0001) substrate on which hetero-epitaxial lithium niobate growth has been reported [3][4][5][6][7]. Deposition of lithium niobate on silicon with silicon oxide layer also has been of interest mainly because of possibilities of integration with silicon on insulator (SOI) technology.…”

Section: Introductionmentioning

confidence: 99%

Combinatorial Chemical Vapor Deposition of Lithium Niobate Thin Films

et al. 2009

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Combinatorial lithium niobate deposition on 150 mm naturally oxidized silicon (100) wafers in a high-vacuum chemical vapor deposition reactor using Li(OBu t ) and Nb(OEt)4(dmae) is presented. The novel precursor supply system allows individual spatial control of precursors impinging rates on the substrate. This results in variations of the film properties in a single experiment at a certain substrate temperature due to the influence of different precursors flow rates and ratios. It efficiently leads to deposition conditions to achieve highly <001> oriented polycrystalline lithium niobate films.

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Preparation and characterization of high-quality stoichiometric LiNbO3 thick films prepared by the sol–gel method

Cited by 27 publications

References 14 publications

Piezoelectric Energy Harvester Based on LiNbO3 Thin Films

Piezoelectric Energy Harvester Based on LiNbO3 Thin Films

Development of a Wireless Mesh Sensing System with High-Sensitivity LiNbO3 Vibration Sensors for Robotic Arm Monitoring

Combinatorial Chemical Vapor Deposition of Lithium Niobate Thin Films

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