2001
DOI: 10.1016/s0040-6090(01)00963-4
|View full text |Cite
|
Sign up to set email alerts
|

Preparation and characterization of sol–gel TiO2 antireflective coatings for silicon

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
5

Citation Types

3
57
0

Year Published

2006
2006
2016
2016

Publication Types

Select...
7
1

Relationship

0
8

Authors

Journals

citations
Cited by 126 publications
(60 citation statements)
references
References 25 publications
3
57
0
Order By: Relevance
“…The mesoporous nano TiO 2 /SiO 2 composite is a promising area due to optimum porous size. Nanosized TiO 2 has been fabricated using sol-gel, sputtering, combustion flame, and thermal plasma (Zhang and Xu 2004;San Vicente et al 2001). Although the sol-gel method is considered as a suitable method to synthesize ultra-fine particles, this method needs a large quantity of solution, longer processing time and heat treatment for crystallization since amorphous TiO 2 has a very little photocatalytic activity.…”
Section: Introductionmentioning
confidence: 99%
“…The mesoporous nano TiO 2 /SiO 2 composite is a promising area due to optimum porous size. Nanosized TiO 2 has been fabricated using sol-gel, sputtering, combustion flame, and thermal plasma (Zhang and Xu 2004;San Vicente et al 2001). Although the sol-gel method is considered as a suitable method to synthesize ultra-fine particles, this method needs a large quantity of solution, longer processing time and heat treatment for crystallization since amorphous TiO 2 has a very little photocatalytic activity.…”
Section: Introductionmentioning
confidence: 99%
“…Titanium oxide is also a well-known semiconductor and it has been shown as one of the most important materials for application as a gas sensor [7]and an antireflective coating [8]. TiO 2 is used in electrochromic devices and solar cells [9].…”
Section: Introductionmentioning
confidence: 99%
“…[4][5] The main methods of depositing titanium oxide coatings were vacuum evaporation, magnetron sputtering, ion beam technique, sol-gel process, etc. [6][7][8] Among these methods, the sol-gel process presented many advantages, such as simple equipment and low cost, possibility of coating wide areas, high optical quality of films, etc. [8][9] Recently, a "layer-by-layer" self-assembly method has been studied for the deposition of TiO 2 nanoparticles.…”
Section: Introductionmentioning
confidence: 99%
“…[6][7][8] Among these methods, the sol-gel process presented many advantages, such as simple equipment and low cost, possibility of coating wide areas, high optical quality of films, etc. [8][9] Recently, a "layer-by-layer" self-assembly method has been studied for the deposition of TiO 2 nanoparticles. The stable TiO 2 films on substrates have formed by the layer-by-layer assembly technique using the organic selfassembled monolayers as the media of the process.…”
Section: Introductionmentioning
confidence: 99%