Preparation and characterization of TiO2 thin film by thermal oxidation of sputtered Ti film

Effects of processing conditions on the physico-chemical characteristics of titanium dioxide ultra-thin films deposited by DC magnetron sputtering

“…As shown in Figure 1, the degree of crystallinity increases with increasing the annealing temperature. Previous studies have achieved the same result after oxidizing of the Ti thin films in air and in annealing temperatures fewer than 700°C [8]. Lee et al [18] have shown that the oxidation of Ti thin films starts from the surface of the film and expands towards the substrate.…”

“…It is believed that the photocatalytic properties of TiO 2 depends on the photogeneration of hole/electron pairs. The situated holes in the valance band have a key role in decomposition of contaminants [8,9]. In addition, hydrophilization of TiO 2 surfaces via UV irradiation and the mechanism of such behavior have been investigated.…”

“…DC magnetron sputtering oxidation of Ti ultra-thin films, in comparison with other TiO 2 thin film production methods, such as sol-gel, ion-assisted deposition and chemical vapor deposition, is a method with more efficiency and flexibility. The various oxidizing temperatures of the Ti films, result in structures with different stoichiometry or crystallinity [8,[11][12][13][14][15].…”

Fabrication and characterization of Si/SiO2/TiO2/ZnO heterostructures from sputtered and oxidized Ti-film

“…Thus, large band offset could be obtained in Si/TiO 2 hetero-junction larger than those of Si/ZnO heterojunction, which would be advantageous to control the electrical transport of carriers [2]. Various techniques have been used to prepare TiO 2 films, one of them can also be thermal oxidation of sputtered titanium film [3]. The insulating material SiO 2 , is also being used as a promising buffer layer to improve not only the crystalline quality of TiO 2 (ZnO) films but also the optical and electrical properties of p-Si heterojunction [4,5,6,7].…”

Facile synthesis of anatase titania microspheres by a novel pyrolysis method and their photocatalytic properties

“…Therefore, it is critical to synthesize a good photocatalyst possessing high specific surface areas and well crystalline anatase TiO 2 with relative small crystallite size in order to obtain high photocatalytic activity. Many research works have been devoted to the controlled fabrication of TiO 2 photocatalyst with various morphologies, such as nanowires, nanorod array, nanotubes, core-shell, hollow structures and microspheres [13][14][15][16][17][18][19][20][21]. Among of them, TiO 2 microsphere could be one of the promising photocatalysts due to its high specific surface area, high porosity, and high photocatalytic activity for pollutants [22][23][24].…”