Preparation and properties of amorphous carbon and hydrocarbon films

Richter, Frank; Bewilogua, K.; Küpfer, H.; Mühling, I.; Rau, B.; Rother, Bernd; Schumacher, Dieter

doi:10.1016/0040-6090(92)90528-j

Cited by 30 publications

(6 citation statements)

References 15 publications

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“…Mominuzzaman et al 26 observed an upward shift of D peak as a function of annealing temperature up to 400 • C, which downshifts rapidly thereafter. Richer et al 61 observed an upward shift of D peak up to a certain value of the substrate bias where after it shifts downward but much explanation was not made for such behavior.…”

Section: Resultsmentioning

confidence: 99%

Raman Scattering Studies on the Structural Properties of Pulsed Laser Deposited Amorphous Carbon Nitride Thin Films

2005

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Raman scattering analysis revealed that the structure of carbon (C) films prepared by pulsed laser deposition at room temperature is predominantly amorphous and the structure of amorphous C nitride (a-CNx) films can be changed with varying substrate temperatures (ST) from 20 to 500 • C. The deposited a-CNx films are composed of C-N, C≡N and C-O bonded materials and the C-N and C≡N bonds are increased with ST. We have found no other obvious peaks that can be distinguished in the range of 900 to 2300 cm −1 in which several peaks always appear in a-CNx films. The spectra were deconvoluted into Raman D and G peaks and the structural parameters were determined. The upward shifts of Raman G peak towards 1592 cm −1 show evidence of a progressive formation of crystallites in a-CNx films upon increase of ST, while the upward shifts of Raman D peak towards 1397 cm −1 have been related to the decrease of bond-angle disorder and sp 3 tetrahedral bonding in its structure. Raman FWHM and I D /I G also indicate that N incorporation with increase of ST caused an increase in the number and/or size of graphitic domains in the a-CNx films.

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Section: Resultsmentioning

confidence: 99%

Raman Scattering Studies on the Structural Properties of Pulsed Laser Deposited Amorphous Carbon Nitride Thin Films

2005

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“…For ion energies in the range 20-200 eY and substrate temperatures less than about 300°C,[83 j the films are amorphous with a tetrahedral bonding arrangement. [85] Other values reported are 29.5 and 29.6 ey[81] (86] for cathodic arc deposited carbon films. The value ofthis distance in diamond is 0.154 nm, so that films with this structure are correctly described as an amorphous version of the diamond structure.…”

Section: Flux Of Bombarding Speciesmentioning

confidence: 99%

“…Richter et al [86) found an optimum DC bias level of -60 V, while McKenzie et al [7S) found that a lower bias, approaching zero, produced optimum diamond-like properties. Richter et al [86) found an optimum DC bias level of -60 V, while McKenzie et al [7S) found that a lower bias, approaching zero, produced optimum diamond-like properties.…”

Section: Flux Of Bombarding Speciesmentioning

confidence: 99%

Film growth

Martin¹,

McKenzie²

1996

Handbook of Vacuum Arc Science and Technology

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“…These properties have been studied for different plasma parameters . Especially the substrate bias voltage turned out to be one main factor which determines whether the a‐C:H coatings are soft and polymer‐like (low substrate bias), hard and diamond‐like (moderate substrate bias), or graphitized (very high bias) …”

Section: Introductionmentioning

confidence: 99%

Film Stress of Amorphous Hydrogenated Carbon on Biaxially Oriented Polyethylene Terephthalate

Bahre

Behm

Grochla

et al. 2015

Plasma Processes & Polymers

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Amorphous hydrogenated carbon (a‐C:H) deposited on steel with plasma enhanced chemical vapor deposition can be used as elongation tolerant oxygen barrier. However, the elongation tolerance of the a‐C:H film is lost if deposited on a poly(ethylene terephthalate) (PET) for reasons unknown. To assess this phenomenon, a‐C:H was deposited on PET, silicon substrates, and silicon micro‐cantilevers, and the stress was determined by measuring the radius of curvature. a‐C:H deposited on PET showed lower compressive stress than on silicon. This difference is not due to the formation of a gradient layer or plastic deformation of PET. Instead, the most probable explanation is that energetic ions cause a partial release of biaxial orientation within the PET, thereby reducing the compressive stress.

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Preparation and properties of amorphous carbon and hydrocarbon films

Cited by 30 publications

References 15 publications

Raman Scattering Studies on the Structural Properties of Pulsed Laser Deposited Amorphous Carbon Nitride Thin Films

Raman Scattering Studies on the Structural Properties of Pulsed Laser Deposited Amorphous Carbon Nitride Thin Films

Film growth

Film Stress of Amorphous Hydrogenated Carbon on Biaxially Oriented Polyethylene Terephthalate

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