9 (CCO) thin films fabricated by the pulsed laser deposition technique was investigated. X-ray diffraction revealed that a fast deposition rate resulted in not only low crystallinity but also the existence of the Ca x CoO 2 secondary phase. The Ca x CoO 2 structure was further confirmed by high-resolution transmission electron microscopy. The CCO thin-film growth was deduced to be a kinetically controlled process, and the quality of the thin films strongly depended on the coalescence process. The formation of Ca x CoO 2 was inevitable during the thin-film growth. However, given enough time and supply of oxygen at a lower deposition rate, it was possible to transform the Ca x CoO 2 phase into the desired CCO phase during the coalescence process, while with faster deposition, more Ca x CoO 2 structure was formed, and the secondary phase could hardly transform into the CCO phase.