Preparation and properties of micro-energetic device for MEMS

Abstract

Recently micro-energetic devices by integrating the energetic materials into micro-electromechanical systems (MEMS) to meet the requirements of energy and function diversity have attracted attention from many researchers. Here the technology of modified electrochemical corrosion which is fully compatible with standard microelectronic manufacturing is reported and used to prepare the porous silicon array with a high area ratio. The micro-energetic device was realized by integrating the energetic material lead picrates into the microchannel of porous silicon array. The structure and properties of porous silicon array/lead picrates were characterized by scanning electron microscope (SEM), X-ray diffraction (XRD) and differential scanning calorimetry (DSC), respectively. The results obtained from these analysis demonstrated that the energetic materials lead picrates is integrated into microchannel of porous silicon array successfully and the heat from DSC equal to 796.05J/g suggests that thermal decomposition of lead picrates inside the microchannel of porous silicon array takes place, indicating the micro-energetic device in this paper posses the function of producing gas. Meanwhile, the micro-energetic device exhibits lower ignition temperature compared to other energetic devices. Therefore, this will enhance energy performances and the function diversity for MEMS devices.